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Сhanges in the structural state and properties of vacuum-arc coatings based on high-entropy alloy TiZrHfNbTa under the influence of nitrogen pressure and bias potential at deposition

Complex studies have been carried out on the effect of nitrogen pressure and the negative bias potential on the structure and properties of vacuum-arc nitride coatings based on the high-entropy alloy TiZrHfNbTa. It is defined that the change in pressure during deposition (in the range 0.01...4 mTo...

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Veröffentlicht in:	Вопросы атомной науки и техники
Datum:	2018
Hauptverfasser:	Sobol’, O.V., Andreev, A.A., Mygushchenko, R.P., Gorban’, V.F., Stolbovoy, V.A., Meylekhov, A.A., Subbotina, V.V., Kovteba, D.V., Zvyagolsky, A.V., Vuets, A.E.
Format:	Artikel
Sprache:	Englisch
Veröffentlicht:	Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2018
Schlagworte:	Физика радиационных и ионно-плазменных технологий
Online Zugang:	https://nasplib.isofts.kiev.ua/handle/123456789/147672
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!
Назва журналу:	Digital Library of Periodicals of National Academy of Sciences of Ukraine
Zitieren:	Сhanges in the structural state and properties of vacuum-arc coatings based on high-entropy alloy TiZrHfNbTa under the influence of nitrogen pressure and bias potential at deposition / O.V. Sobol’, A.A. Andreev, R.P. Mygushchenko, V.F. Gorban’, V.A. Stolbovoy, A.A. Meylekhov, V.V. Subbotina, D.V. Kovteba, A.V. Zvyagolsky, A.E. Vuets // Вопросы атомной науки и техники. — 2018. — № 5. — С. 109-115. — Бібліогр.: 26 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine

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