Сhanges in the structural state and properties of vacuum-arc coatings based on high-entropy alloy TiZrHfNbTa under the influence of nitrogen pressure and bias potential at deposition

• Published in: Вопросы атомной науки и техники
• Date: 2018
• Main Authors: Sobol’, O.V., Andreev, A.A., Mygushchenko, R.P., Gorban’, V.F., Stolbovoy, V.A., Meylekhov, A.A., Subbotina, V.V., Kovteba, D.V., Zvyagolsky, A.V., Vuets, A.E.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2018
• Subjects: Физика радиационных и ионно-плазменных технологий
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/147672
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Сhanges in the structural state and properties of vacuum-arc coatings based on high-entropy alloy TiZrHfNbTa under the influence of nitrogen pressure and bias potential at deposition / O.V. Sobol’, A.A. Andreev, R.P. Mygushchenko, V.F. Gorban’, V.A. Stolbovoy, A.A. Meylekhov, V.V. Subbotina, D.V. Kovteba, A.V. Zvyagolsky, A.E. Vuets // Вопросы атомной науки и техники. — 2018. — № 5. — С. 109-115. — Бібліогр.: 26 назв. — англ.

Complex studies have been carried out on the effect of nitrogen pressure and the negative bias potential on the structure and properties of vacuum-arc nitride coatings based on the high-entropy alloy TiZrHfNbTa. It is defined that the change in pressure during deposition (in the range 0.01...4 mTo...