Probe measurements of parameters of dense gasmetallic plasma in the inhomogeneous magnetic field of a planar magnetron discharge

• Datum: 2018
• Hauptverfasser: Chunadra, А.G., Sereda, К.N., Tarasov, I.K.
• Format: Artikel
• Sprache: English
• Veröffentlicht: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2018
• Schriftenreihe: Вопросы атомной науки и техники
• Schlagworte: Низкотемпературная плазма и плазменные технологии
• Online Zugang: https://nasplib.isofts.kiev.ua/handle/123456789/149062
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Zitieren: Probe measurements of parameters of dense gasmetallic plasma in the inhomogeneous magnetic field of a planar magnetron discharge / А.G. Chunadra, К.N. Sereda, I.K. Tarasov // Вопросы атомной науки и техники. — 2018. — № 6. — С. 252-254. — Бібліогр.: 4 назв. — англ.

The paper presents measurements of the electron temperature and plasma concentration in both stationary and pulsed operation modes of a longitudinal planar MDC with a magnetically insulated anode in stationary and highcurrent pulsed operation modes with a high-voltage impulse voltage addition. The measurements were carried out according to the standard procedure for Langmuir double probes. The obtained volt-ampere characteristics of a double probe show that the electron temperature increases by a factor of two in the pulsed mode of operation of the magnetron in comparison with the steady-state regime, and the density of the pulsed plasma increases by three orders of magnitude.