Probe measurements of parameters of dense gasmetallic plasma in the inhomogeneous magnetic field of a planar magnetron discharge

• Published in: Вопросы атомной науки и техники
• Date: 2018
• Main Authors: Chunadra, А.G., Sereda, К.N., Tarasov, I.K.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2018
• Subjects: Низкотемпературная плазма и плазменные технологии
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/149062
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Probe measurements of parameters of dense gasmetallic plasma in the inhomogeneous magnetic field of a planar magnetron discharge / А.G. Chunadra, К.N. Sereda, I.K. Tarasov // Вопросы атомной науки и техники. — 2018. — № 6. — С. 252-254. — Бібліогр.: 4 назв. — англ.

The paper presents measurements of the electron temperature and plasma concentration in both stationary and pulsed operation modes of a longitudinal planar MDC with a magnetically insulated anode in stationary and highcurrent pulsed operation modes with a high-voltage impulse voltage addition. The...