Structure and properties of TiOx and TiNxOy coatings formed in vacuum ARC plasma fluxes
The structure, microhardness and protective properties of titanium oxide and titanium oxynitride coatings formed in vacuum arc plasma fluxes depending on the negative potential on the substrate and the oxygen pressure, and also on the oxygen content in the gas mixture (N₂+ O₂) were studied. It is...
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| Published in: | Вопросы атомной науки и техники |
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| Date: | 2018 |
| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2018
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/149070 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Structure and properties of TiOx and TiNxOy coatings formed in vacuum ARC plasma fluxes / V.A. Belous, V.M. Lunyov, A.S. Kuprin, M.A. Bortnitskaya // Вопросы атомной науки и техники. — 2018. — № 6. — С. 297-299. — Бібліогр.: 11 назв. — англ. |