Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors
X-ray reflectometry in the hard X-ray region (λ = 0.154 nm) was used to investigate the barrier properties of carbon layers 0.2-1.3 nm thick in Sc/Si multilayer X-ray mirrors (MXMs) deposited by DC magnetron sputtering. Precise measurement of the MXM period makes it possible to record volumetric cha...
Збережено в:
| Опубліковано в: : | Functional Materials |
|---|---|
| Дата: | 2018 |
| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
НТК «Інститут монокристалів» НАН України
2018
|
| Теми: | |
| Онлайн доступ: | https://nasplib.isofts.kiev.ua/handle/123456789/157155 |
| Теги: |
Додати тег
Немає тегів, Будьте першим, хто поставить тег для цього запису!
|
| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors / Yu.P. Pershyn, I.Yu. Devizenko, V.S. Chumak, A.Yu. Devizenko, V.V. Kondratenko // Functional Materials. — 2018. — Т. 25, № 3. — С. 505-515. — Бібліогр.: 18 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862731584683114496 |
|---|---|
| author | Pershyn, Yu.P. Devizenko, I.Yu. Chumak, V.S. Devizenko, A.Yu. Kondratenko, V.V. |
| author_facet | Pershyn, Yu.P. Devizenko, I.Yu. Chumak, V.S. Devizenko, A.Yu. Kondratenko, V.V. |
| citation_txt | Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors / Yu.P. Pershyn, I.Yu. Devizenko, V.S. Chumak, A.Yu. Devizenko, V.V. Kondratenko // Functional Materials. — 2018. — Т. 25, № 3. — С. 505-515. — Бібліогр.: 18 назв. — англ. |
| collection | DSpace DC |
| container_title | Functional Materials |
| description | X-ray reflectometry in the hard X-ray region (λ = 0.154 nm) was used to investigate the barrier properties of carbon layers 0.2-1.3 nm thick in Sc/Si multilayer X-ray mirrors (MXMs) deposited by DC magnetron sputtering. Precise measurement of the MXM period makes it possible to record volumetric changes in the Sc/C/Si MXM with an accuracy better than 0.01 nm, thus the interaction of the carbon layers with the material of the matrix layers was revealed. The formation of carbide (Si-on-Sc interface) and carbide-silicide (Sc-on-Si nterface) layers was found. The reflectivity of the Sc/C/Si mirrors at the wavelength of ~ 46.9 nm was estimated.
|
| first_indexed | 2025-12-07T19:26:42Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-157155 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1027-5495 |
| language | English |
| last_indexed | 2025-12-07T19:26:42Z |
| publishDate | 2018 |
| publisher | НТК «Інститут монокристалів» НАН України |
| record_format | dspace |
| spelling | Pershyn, Yu.P. Devizenko, I.Yu. Chumak, V.S. Devizenko, A.Yu. Kondratenko, V.V. 2019-06-19T16:32:48Z 2019-06-19T16:32:48Z 2018 Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors / Yu.P. Pershyn, I.Yu. Devizenko, V.S. Chumak, A.Yu. Devizenko, V.V. Kondratenko // Functional Materials. — 2018. — Т. 25, № 3. — С. 505-515. — Бібліогр.: 18 назв. — англ. 1027-5495 DOI:https://doi.org/10.15407/fm25.03.505 https://nasplib.isofts.kiev.ua/handle/123456789/157155 X-ray reflectometry in the hard X-ray region (λ = 0.154 nm) was used to investigate the barrier properties of carbon layers 0.2-1.3 nm thick in Sc/Si multilayer X-ray mirrors (MXMs) deposited by DC magnetron sputtering. Precise measurement of the MXM period makes it possible to record volumetric changes in the Sc/C/Si MXM with an accuracy better than 0.01 nm, thus the interaction of the carbon layers with the material of the matrix layers was revealed. The formation of carbide (Si-on-Sc interface) and carbide-silicide (Sc-on-Si nterface) layers was found. The reflectivity of the Sc/C/Si mirrors at the wavelength of ~ 46.9 nm was estimated. en НТК «Інститут монокристалів» НАН України Functional Materials Characterization and properties Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors Article published earlier |
| spellingShingle | Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors Pershyn, Yu.P. Devizenko, I.Yu. Chumak, V.S. Devizenko, A.Yu. Kondratenko, V.V. Characterization and properties |
| title | Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors |
| title_full | Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors |
| title_fullStr | Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors |
| title_full_unstemmed | Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors |
| title_short | Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors |
| title_sort | application of carbon as a barrier layer in sc/si multilayer x-ray mirrors |
| topic | Characterization and properties |
| topic_facet | Characterization and properties |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/157155 |
| work_keys_str_mv | AT pershynyup applicationofcarbonasabarrierlayerinscsimultilayerxraymirrors AT devizenkoiyu applicationofcarbonasabarrierlayerinscsimultilayerxraymirrors AT chumakvs applicationofcarbonasabarrierlayerinscsimultilayerxraymirrors AT devizenkoayu applicationofcarbonasabarrierlayerinscsimultilayerxraymirrors AT kondratenkovv applicationofcarbonasabarrierlayerinscsimultilayerxraymirrors |