Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors

• Published in: Functional Materials
• Date: 2018
• Main Authors: Pershyn, Yu.P., Devizenko, I.Yu., Chumak, V.S., Devizenko, A.Yu., Kondratenko, V.V.
• Format: Article
• Language: English
• Published: НТК «Інститут монокристалів» НАН України 2018
• Subjects: Characterization and properties
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/157155
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors / Yu.P. Pershyn, I.Yu. Devizenko, V.S. Chumak, A.Yu. Devizenko, V.V. Kondratenko // Functional Materials. — 2018. — Т. 25, № 3. — С. 505-515. — Бібліогр.: 18 назв. — англ.

X-ray reflectometry in the hard X-ray region (λ = 0.154 nm) was used to investigate the barrier properties of carbon layers 0.2-1.3 nm thick in Sc/Si multilayer X-ray mirrors (MXMs) deposited by DC magnetron sputtering. Precise measurement of the MXM period makes it possible to record volumetric cha...