Kinetics of crystals growth under electron-beam crystallization of amorphous films of hafnium dioxide

Amorphous films of HfO₂ are prepared by laser ablation of Hf target in an oxygen atmosphere. Its crystallization was performed under the electron beam impact in a column of electron microscope. Formation and growth of HfO₂ crystals are investigated in situ. The transformation kinetic curves are plot...

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Published in:Functional Materials
Date:2018
Main Authors: Bagmut, A.G., Bagmut, I.A.
Format: Article
Language:English
Published: НТК «Інститут монокристалів» НАН України 2018
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Online Access:https://nasplib.isofts.kiev.ua/handle/123456789/157169
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Journal Title:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:Kinetics of crystals growth under electron-beam crystallization of amorphous films of hafnium dioxide / A.G. Bagmut, I.A. Bagmut // Functional Materials. — 2018. — Т. 25, № 3. — С. 525-533. — Бібліогр.: 20 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
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author Bagmut, A.G.
Bagmut, I.A.
author_facet Bagmut, A.G.
Bagmut, I.A.
citation_txt Kinetics of crystals growth under electron-beam crystallization of amorphous films of hafnium dioxide / A.G. Bagmut, I.A. Bagmut // Functional Materials. — 2018. — Т. 25, № 3. — С. 525-533. — Бібліогр.: 20 назв. — англ.
collection DSpace DC
container_title Functional Materials
description Amorphous films of HfO₂ are prepared by laser ablation of Hf target in an oxygen atmosphere. Its crystallization was performed under the electron beam impact in a column of electron microscope. Formation and growth of HfO₂ crystals are investigated in situ. The transformation kinetic curves are plotted on the basis of a frame-by-frame analysis of the video recorded flick during the film crystallization. According to the structural and morphological features, the phase transformation corresponds to the dendrite polymorph crystallization and can be either single-stage or two-stage in nature. In the latter case, the size-phase effect takes place, consisting in the fact, that when the crystal of orthorhombic modification of HfO₂ reaches a critical size (~0.2 μm), it splits into domains with orthorhombic and monoclinic crystal lattices. The kinetic parameters of the crystallization are determined and it is shown, that the quadratic dependence of the fraction of the crystalline phase on time takes place. The average value of the relative length for the dendrite polymorphic crystallization is about 3075. The phase transition from the amorphous state to the crystalline one is accompanied by increasing of the relative density of matter of the film by about 2.5 %. The crystallized film consists predominantly of dendrites of the monoclinic modification of HfO₂.
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id nasplib_isofts_kiev_ua-123456789-157169
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
issn 1027-5495
language English
last_indexed 2025-12-07T17:39:18Z
publishDate 2018
publisher НТК «Інститут монокристалів» НАН України
record_format dspace
spelling Bagmut, A.G.
Bagmut, I.A.
2019-06-19T16:44:11Z
2019-06-19T16:44:11Z
2018
Kinetics of crystals growth under electron-beam crystallization of amorphous films of hafnium dioxide / A.G. Bagmut, I.A. Bagmut // Functional Materials. — 2018. — Т. 25, № 3. — С. 525-533. — Бібліогр.: 20 назв. — англ.
1027-5495
DOI:https://doi.org/10.15407/fm25.03.525
https://nasplib.isofts.kiev.ua/handle/123456789/157169
Amorphous films of HfO₂ are prepared by laser ablation of Hf target in an oxygen atmosphere. Its crystallization was performed under the electron beam impact in a column of electron microscope. Formation and growth of HfO₂ crystals are investigated in situ. The transformation kinetic curves are plotted on the basis of a frame-by-frame analysis of the video recorded flick during the film crystallization. According to the structural and morphological features, the phase transformation corresponds to the dendrite polymorph crystallization and can be either single-stage or two-stage in nature. In the latter case, the size-phase effect takes place, consisting in the fact, that when the crystal of orthorhombic modification of HfO₂ reaches a critical size (~0.2 μm), it splits into domains with orthorhombic and monoclinic crystal lattices. The kinetic parameters of the crystallization are determined and it is shown, that the quadratic dependence of the fraction of the crystalline phase on time takes place. The average value of the relative length for the dendrite polymorphic crystallization is about 3075. The phase transition from the amorphous state to the crystalline one is accompanied by increasing of the relative density of matter of the film by about 2.5 %. The crystallized film consists predominantly of dendrites of the monoclinic modification of HfO₂.
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НТК «Інститут монокристалів» НАН України
Functional Materials
Characterization and properties
Kinetics of crystals growth under electron-beam crystallization of amorphous films of hafnium dioxide
Article
published earlier
spellingShingle Kinetics of crystals growth under electron-beam crystallization of amorphous films of hafnium dioxide
Bagmut, A.G.
Bagmut, I.A.
Characterization and properties
title Kinetics of crystals growth under electron-beam crystallization of amorphous films of hafnium dioxide
title_full Kinetics of crystals growth under electron-beam crystallization of amorphous films of hafnium dioxide
title_fullStr Kinetics of crystals growth under electron-beam crystallization of amorphous films of hafnium dioxide
title_full_unstemmed Kinetics of crystals growth under electron-beam crystallization of amorphous films of hafnium dioxide
title_short Kinetics of crystals growth under electron-beam crystallization of amorphous films of hafnium dioxide
title_sort kinetics of crystals growth under electron-beam crystallization of amorphous films of hafnium dioxide
topic Characterization and properties
topic_facet Characterization and properties
url https://nasplib.isofts.kiev.ua/handle/123456789/157169
work_keys_str_mv AT bagmutag kineticsofcrystalsgrowthunderelectronbeamcrystallizationofamorphousfilmsofhafniumdioxide
AT bagmutia kineticsofcrystalsgrowthunderelectronbeamcrystallizationofamorphousfilmsofhafniumdioxide