Kinetics of crystals growth under electron-beam crystallization of amorphous films of hafnium dioxide

• Published in: Functional Materials
• Date: 2018
• Main Authors: Bagmut, A.G., Bagmut, I.A.
• Format: Article
• Language: English
• Published: НТК «Інститут монокристалів» НАН України 2018
• Subjects: Characterization and properties
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/157169
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Kinetics of crystals growth under electron-beam crystallization of amorphous films of hafnium dioxide / A.G. Bagmut, I.A. Bagmut // Functional Materials. — 2018. — Т. 25, № 3. — С. 525-533. — Бібліогр.: 20 назв. — англ.

Amorphous films of HfO₂ are prepared by laser ablation of Hf target in an oxygen atmosphere. Its crystallization was performed under the electron beam impact in a column of electron microscope. Formation and growth of HfO₂ crystals are investigated in situ. The transformation kinetic curves are plot...