Kinetics of crystals growth under electron-beam crystallization of amorphous films of hafnium dioxide
Amorphous films of HfO₂ are prepared by laser ablation of Hf target in an oxygen atmosphere. Its crystallization was performed under the electron beam impact in a column of electron microscope. Formation and growth of HfO₂ crystals are investigated in situ. The transformation kinetic curves are plot...
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| Published in: | Functional Materials |
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| Date: | 2018 |
| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
НТК «Інститут монокристалів» НАН України
2018
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/157169 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Kinetics of crystals growth under electron-beam crystallization of amorphous films of hafnium dioxide / A.G. Bagmut, I.A. Bagmut // Functional Materials. — 2018. — Т. 25, № 3. — С. 525-533. — Бібліогр.: 20 назв. — англ. |
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