Development of anti-reflecting surfaces based on Si micropyramids and wet-chemically etched Si nanowire arrays

• Veröffentlicht in: Functional Materials
• Datum: 2018
• Hauptverfasser: Druzhinin, A.A., Yerokhov, V.Y., Nichkalo, S.I., Ostapiv, O.Y.
• Format: Artikel
• Sprache: English
• Veröffentlicht: НТК «Інститут монокристалів» НАН України 2018
• Schlagworte: Characterization and properties
• Online Zugang: https://nasplib.isofts.kiev.ua/handle/123456789/157185
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Zitieren: Development of anti-reflecting surfaces based on Si micropyramids and wet-chemically etched Si nanowire arrays / A.A. Druzhinin, V.Y. Yerokhov, S.I. Nichkalo, O.Y. Ostapiv // Functional Materials. — 2018. — Т. 25, № 4. — С. 675-680. — Бібліогр.: 44 назв. — англ.

In this paper experimental results on study of optical properties of Si wafers with surface textures in form of Si random pyramids, Si nanowire arrays, and pyramidal Si combined with Si nanowire arrays are presented. It is shown that the use of the metal-assisted chemical etching method allows to fa...