Nano periodic structure forma-tion in 4H–SiC crystal using femtosecond laser double-pulses

The photo-induced periodic nano structure inside 4H–SiC have been induced by a femtosecond double pulse train. The alignment of the periodic structure is in the direction independently from crystal orientation. In particular, FE-SEM analysis revealed that the periodic structure on the fractured surf...

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Bibliographic Details
Date:2018
Main Authors: Kim, E., Shimotsuma, Y., Sakakura, M., Miura, K.
Format: Article
Language:English
Published: Інститут надтвердих матеріалів ім. В.М. Бакуля НАН України 2018
Series:Сверхтвердые материалы
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Online Access:https://nasplib.isofts.kiev.ua/handle/123456789/167103
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Journal Title:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:Nano periodic structure forma-tion in 4H–SiC crystal using femtosecond laser double-pulses / E. Kim, Y. Shimotsuma, M. Sakakura, K. Miura // Сверхтвердые материалы. — 2018. — № 4. — С. 41-50. — Бібліогр.: 35 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine