Features of Investigations of Multilayer Nitride Coatings Based on Cr and Zr
The studies of the structure and properties of nanoscale multilayer coatings of Zr- and Cr-based refractory metals obtained by the vacuum arc cathode deposition are summarized in a brief review of the literature data. A comparative analysis of the microstructure and properties of ZrN/CrN composite c...
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Інститут металофізики ім. Г.В. Курдюмова НАН України
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| Zitieren: | Features of Investigations of Multilayer Nitride Coatings Based on Cr and Zr / O.V. Maksakova, O.D. Pogrebnjak, V.M. Beresnev // Progress in Physics of Metals. — 2018. — Vol. 19, No 1. — P. 25-48. — Bibliog.: 85 titles. — eng. |
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| author | Maksakova, O.V. Pogrebnjak, O.D. Beresnev, V.M. |
| author_facet | Maksakova, O.V. Pogrebnjak, O.D. Beresnev, V.M. |
| citation_txt | Features of Investigations of Multilayer Nitride Coatings Based on Cr and Zr / O.V. Maksakova, O.D. Pogrebnjak, V.M. Beresnev // Progress in Physics of Metals. — 2018. — Vol. 19, No 1. — P. 25-48. — Bibliog.: 85 titles. — eng. |
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| container_title | Успехи физики металлов |
| description | The studies of the structure and properties of nanoscale multilayer coatings of Zr- and Cr-based refractory metals obtained by the vacuum arc cathode deposition are summarized in a brief review of the literature data. A comparative analysis of the microstructure and properties of ZrN/CrN composite coatings depending on the deposition conditions (constant negative potential of the substrate, pulsed high-voltage bias potential, partial pressure, reaction gas velocity) and modulation period for multilayered structure is carried out. General regularities consisting in the presence of the columnar structure and the growth texture are revealed. They show that there is a prevailing (111) orientation for investigated coatings. Conditions for obtaining improved physical, mechanical, and tribological properties of the coatings are determined.
В кратком обзоре литературных данных обобщены результаты исследований структуры и свойств наномасштабных многослойных покрытий нитридов тугоплавких металлов на основе Zr и Cr, полученных методами вакуумно-дугового осаждения катода. Проведён сравнительный анализ микроструктуры и свойств композиционных покрытий ZrN/CrN в зависимости от условий осаждения (постоянного или импульсного отрицательного потенциала подложки, импульсного высоковольтного потенциала смещения, парциального давления, скорости потока рабочего газа) и периода модуляции многослойной структуры. Выявлены общие закономерности, состоящие в наличии столбчатой структуры и текстуры роста. Показано, что для исследуемых покрытий имеет место преимущественная ориентация (111). Установлены условия получения улучшенных физико-механических и трибологических характеристик покрытий.
У короткому огляді літературних даних узагальнено результати досліджень структури та властивостей наномасштабних багатошарових покриттів тяжкотопких металів на основі Zr та Cr, одержаних методами вакуумно-дугового осадження катоди. Проведено порівняльну аналізу мікроструктури та властивостей композиційних покриттів ZrN/CrN, залежно від умов осадження (постійного неґативного потенціялу підложжя, імпульсного високовольтного потенціялу зміщення, парціяльного тиску, швидкости потоку робочого газу) та періоду модуляції багатошарової структури. Виявлено загальні закономірності, що полягають у наявності стовпчастої структури та текстури росту. Показано, що для досліджуваних покриттів має місце переважна орієнтація (111). Визначено умови одержання поліпшених фізико-механічних і трибологічних властивостей покриттів.
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ISSN 1608-1021. Usp. Fiz. Met., 2018, Vol. 19, No. 1 25
https://doi.org/10.15407/ufm.19.01.025
PACS numbers: 62.20.Qp, 62.25.-g, 68.55.-a, 68.65.Ac, 81.65.Kn
o.V. MakSakoVa and o.d. Pogrebnjak
Sumy State University, 2 Rymsky-Korsakov Str., UA-40007 Sumy, Ukraine
V.M. bereSneV
V.N. Karazin Kharkiv National University, 4 Svobody Sqr.,
UA-61022 Kharkiv, Ukraine
featUres of investigations of MUltilayer
nitride coatings based on cr and zr
The studies of the structure and properties of nanoscale multilayer coatings of Zr-
and Cr-based refractory metals obtained by the vacuum arc cathode deposition are
summarized in a brief review of the literature data. A comparative analysis of the
microstructure and properties of ZrN/CrN composite coatings depending on the
deposition conditions (constant negative potential of the substrate, pulsed high-
voltage bias potential, partial pressure, reaction gas velocity) and modulation period
for multilayered structure is carried out. General regularities consisting in the
presence of the columnar structure and the growth texture are revealed. They show
that there is a prevailing (111) orientation for investigated coatings. Conditions for
obtaining improved physical, mechanical, and tribological properties of the coatings
are determined.
Keywords: multilayer coatings, structure, hardness, corrosion resistance, wear.
introduction
The scientific and technical interest in the creation of coatings with
improved characteristics is associated with the use of new types of mul-
tilayer structures with a gradient nature that performs different func-
tions features: adhesive, barrier, wear-resistant, antifriction, etc. [1–9].
One of the most promising areas for increasing working characteristics
of nitrides via their conversion into nanostructured state is a creation
of multilayer structures of a nanosize thick [10, 11]. In this case, the
alternation of two or more layers of material with different physical
and mechanical characteristics can significantly change the properties
26 ISSN 1608-1021. Prog. Phys. Met., 2018, Vol. 19, No. 1
O.V. Maksakova, O.D. Pogrebnjak, and V.M. Beresnev
of the system, including stress concentration and crack propagation,
resulting in an increase in the fracture toughness of the material. Mul-
tilayer compositions based on zirconium and chromium nitrides offer a
specific interest. The selection of the components for multilayer system
is caused by a series of factors. We already know that ZrN films pos-
sess a high-energy capacity, the ability to absorb deformation energy
and increase the dissipative properties of surface layers, as well as the
ability to dissipate effectively deformation energy during the external
friction [12, 13]. In addition, the ZrN has a high melting point, Young’s
modulus, chemical inertness and hardness, good thermal and radiation
resistance, as well as thermal shock resistance [14–17]. The CrN films
also show oxidation resistance, good wear resistance and high tempera-
ture sta bility [18–22]. However, a single-layer coating of chromium
nitride does not have sufficient hardness and is highly susceptible to
abrasion [23–26]. The composite compound in the multilayer structure
of ZrN and CrN is considered to as a promising, since the high me-
chanical properties of ZrN are well complemented by the properties of
CrN [19, 27, 28].
The goal of this work is to elucidate the current practice and future
development trends of multilayer ZrN/CrN systems. Analysis of the
results published in scientific and technical literature enabled to deter-
mine the regularities of structure formation, the physical, mechanical,
and chemical properties of chromium- and zirconium-based layered ma-
terials obtained via different deposition methods. The review article ana-
lyzes the properties of coatings with hardness in the range of 25–55 GPa,
combining high chemical, physical, and mechanical properties.
Table 1 comprises state-of-the-art findings of different authors on
CrN/ZrN nanostructured physically vapour deposited (PVD) coatings
with a thick of bilayers in the range of 2.2–300 nm. One can see from
the presented results that hardness of the coatings (H), elastic modulus
(E), and other physical and mechanical as well as tribological properties
depend on many factors, but first of all on the conditions of the coating
formation. Below, we consider in detail data summarized in Table 1.
In the work [34], authors studied an influence of the thickness of
bilayers on the microstructural evolution of the coating and their inter-
relation with mechanical and tribological properties. It is noted that
when the thickness of the film decreases, a predominant orientation of
the crystallite growth with the [111] axis perpendicular to the growth
plane is observed, which is manifested in the relative intensity increase
of the corresponding reflex. These results indicate a formation of the
superstructure in case of the least layer thickness Λ = 11.7 nm. Mecha-
nical properties of CrN/ZrN coatings, viz. hardness and elastic modu-
lus, are determined by the nanoindentation of the films and amounted
29 GPa and 250 GPa, respectively, while thickness of two nanolayers
ISSN 1608-1021. Usp. Fiz. Met., 2018, Vol. 19, No. 1 27
Features of Investigations of Multilayer Nitride Coatings Based on Cr and Zr
varied from 66.7 to 11.7 nm. Tribological tests of the coatings at hand
showed that friction coefficient and wear rate (factor) strongly depend
on a bilayer thickness. The highest values for these parameters are fixed
for the sample with Λ = 11.7 nm: 0.54 and 5.5 ⋅ 10−7 mm3/Nm, respecti-
vely. Consequently, such tribological characteristics make coatings pro-
mising for a surface strain hardening of devices.
As a one more example of improving of mechanical and tribological
properties of multilayer CrN/ZrN coatings, stands paper [35], where
authors analyse effect of bilayer quantity on the morphology, breaking
strength, friction coefficient, polarization resistance, and corrosion rate.
The correlation between mechanical and microstructural properties of
the films was also studied.
The samples were obtained via the magnetron sputtering during the
same waiting regimes, i.e., the same substrate temperature, pressure,
negative bias potential and flux rate relation Ar/N2, but with different
quantities of bilayers: 1, 8, 15 and 30. The atomic force microscope pat-
terns for a surface of the formed coatings showed that films has a sub-
stantially high homogeneity, and there no any porosity, delamination,
or microdroplet fraction on the surface. Optimal combination of values
of the grain size and roughness correspond to the coating with 15 bi-
layers. Electrochemical behaviour of 3.6% coating in the NaCl solution
is investigated by the electrochemical impedance spectroscopy and Tafel
polarization curves. The resistance of the samples to corrosion increased
with an increase of the number of bilayers due to the quantity of bound-
aries of alternating CrN and ZrN monolayers and their interaction.
As well as previous papers, article [36] also deals with physical and
mechanical properties of CrN/ZrN films and their connection with tri-
bological features. The samples were synthesized via magnetron sput-
tering with unbalanced scheme and change of the rotational velocity for
substrate carrier, but with the fixed coating conditions. Chemical ele-
ments were distributed over the depth (profiling) using the Auger spec-
troscopy. Authors [36] revealed that concentration of N, Cr, and Zr
components remains unchanged over the all coating thickness. An aver-
age value for atomic composition in the films is of the order of (Cr +
+ Zr)/N = 1. Structural formation of the coatings was determined by the
X-ray diffraction. It is stressed that, independently on a rotational ve-
locity of the substrate carrier, the coatings with a preferential (111)
orientation are formed. However, these coatings have different level of
the internal elastic stresses, i.e., if a bilayer thickness decreases (up to
2.1 nm), the internal compression stresses increase (up to 2.7 GPa). In
addition, the sizes of the forming crystals varied within the range of
6.2–9.4 nm depending on the diffraction peak intensities and bilayer
thickness. The nanohardness of CrN/ZrN systems, measured via the
Berkovich indenter, and elastic modulus also increase as compared to
28 ISSN 1608-1021. Prog. Phys. Met., 2018, Vol. 19, No. 1
O.V. Maksakova, O.D. Pogrebnjak, and V.M. Beresnev
Table 1. Deposition conditions, characteristics and properties of CrN/ZrN coatings
Authors Composition Method Deposition parameters
Significance of properties
tribological mechanical
O. Sobol et
al., 2016
[29–31]
ZrN/CrN Vacuum arc
deposition
Substrate: steel 12Х18Н10Т, Λ = 20– 300 nm,
µ = 10 µm, І = 100 А, PN = 10−5–5 ⋅ 10−3 Torr,
−150 V ≤ US ≤ −120 V, ТS = 250–350 °С,
quantity of layers 12, 24, 564
Н = 32–42 GPa, Е = 210–270 GPa
J.-W. Lee
et al.,
2013 [32]
CrN/ZrN Vacuum arc
deposition
Substrate: silicon wafers and TiC,
Λ = 16 nm, µ = 565–577 nm, І = 70 A, PN =
= 8.6 ⋅ 10−1 Pa, ТS = 150°С, US = −100 V
Friction coefficient 0.41–0.45, wear
factor 3.62 ⋅ 10−7–4.26 ⋅ 10−4 mm3/Nm,
impact toughness K = 1.85–2.01 MPa ⋅ m1/2
Н = 28 GPa, Е = 267 GPa, H3/E2 =
= 0.11 GPa
J.-W. Lee
et al.,
2011 [33]
CrN/ZrN Vacuum arc
deposition
Substrate: silicon wafers and TiC, Λ = 5–
30 nm, µ = 511–677 nm, I = 70 A, PN =
= 8.6 ⋅ 10−1 Pa, TS = 150 °С, US = −100 V,
grain sizes 2.9–4.69 nm
Friction coefficient 0.17±0.05, wear factor
3.62⋅10−7–4.26 ⋅ 10−4 mm3/Nm, impact
toughness K = 1.88–2.15 MPa ⋅ m1/2
Н = 25.2 GPa,
Е = 282 GPa, H3/E2 = 0.3 GPa
Z.G. Zhang
et al.,
2009 [34]
CrN/ZrN Reaction
magnetron
sputtering
Substrate: silicon wafers and AISI M2 steel,
Λ = 11.7–66.7 nm, µ = 1.9–2.1 µm, PN =
= 5 ⋅ 10−4 Pa, US = −60 V, quantity of layers
30–180
Friction coefficient 0.32–0.54, wear
factor 5.5 ⋅ 10−7 mm3/Nm
Н = 29 GPa, Е = 256 GPa
N. San-
chez et al.,
2008 [35]
CrN/ZrN High-fre qu-
ency mag-
netron sput-
tering
Substrate: AISI 420 steel, Λ = 100–1000 nm,
µ = 3 µm, PN = 6.6 ⋅ 10−3 mbar, ТS = 250 °С,
US = −60 V, grain sizes 39–99 nm, quantity
of bilayers 1, 8, 15, and 30
Friction coefficient 0.32–0,54
S.-Y. Lee
et al.,
2008 [36]
CrN/ZrN Unbalanced
magnetron
sputtering
Substrate AISI H13 steel, Λ = 2.1–7.1 nm,
PN = 3.3 ⋅ 10−3 Torr, ТS = 150 °С, US = −100
V, grain sizes 6.2–9.4 nm, substrate rotation
speed 3, 6, and 15 rpm
Wear factor 0.74 ⋅ 10−6 mm3/Nm Н = 28.1–31.8 GPa, Е = 290–321 GPa,
H3/E2 = 0.19–0.31
D.J. Li et
al., 2007
[37]
CrN/ZrN Magnetron
sputtering
Substrate: Si, Λ = 2.2–3.6 nm, µ = 1–1.2 µm,
PN = 0.26 Pa, ТS = 250 °С, US = –200 V, sub-
strate rotation 4–11 rpm
Failure load 85 mN, wear factor
0.38 ⋅ 10−5 mm3/Nm
Н = 32 GPa
D.J. Li et
al., 2006
[38, 39]
CrN/ZrN Dc mag net-
ron sputter-
ing
Substrate: silicon wafers, µ = 800–1000 nm,
PN = 0.28 Pa, ТS = 200 °С, US = −200 V, sub-
strate rotation speed 13 rpm
Failure load 100 mN Н = 48.39–56.47 GPa, E = 381 GPa
D.J. Li et
al., 2004
[40]
CrN/ZrN Dc mag net-
ron sputter-
ing
Substrate: silicon wafers, PN = 0.28 Pa Н = 48.39–56.47 GPa, Е = 381 GPa
the mononitride CrN coatings (23 GPa and 250 GPa) and reach maximal
values of 31.8 and 321.5 GPa, respectively.
Firstly, the multilayer CrN/ZrN structures were obtained in Ref.
[40]. Further studies [38–40] report on the considerable improvement of
strength characteristics of the coatings using the dc magnetron sputter-
ing. In this way, the multilayer CrN/ZrN films with a nanohardness
reaching 55 GPa and failure load of the order of 102 mN were synthe-
sized. Such high parameters were reached due to variation of deposition
ISSN 1608-1021. Usp. Fiz. Met., 2018, Vol. 19, No. 1 29
Features of Investigations of Multilayer Nitride Coatings Based on Cr and Zr
parameters, viz. due to reaction gas (N2 and N2 + NH3) and its flow rate.
Other deposition conditions were as follows: TS = 200 °C, US = −200 V,
dS–T = 12 cm, PN2, NH3
= 0.28 Pa, υS = 13 rpm. It is noticed that, if a flow
rate of N2 is 0.6 сm3/min, the NaCl-type structure coating with a pre-
vailing (111) orientation forms. As the flow-rate value slightly increas-
es up to 0.8 cm3/min, the preferred orientation is (200). When the value
reaches 1 cm3/min, diffraction reflexes totally disappear. Thus, at a
high flow rate of the reaction gas, amorphous nonstoichiometric chro-
Table 1. Deposition conditions, characteristics and properties of CrN/ZrN coatings
Authors Composition Method Deposition parameters
Significance of properties
tribological mechanical
O. Sobol et
al., 2016
[29–31]
ZrN/CrN Vacuum arc
deposition
Substrate: steel 12Х18Н10Т, Λ = 20– 300 nm,
µ = 10 µm, І = 100 А, PN = 10−5–5 ⋅ 10−3 Torr,
−150 V ≤ US ≤ −120 V, ТS = 250–350 °С,
quantity of layers 12, 24, 564
Н = 32–42 GPa, Е = 210–270 GPa
J.-W. Lee
et al.,
2013 [32]
CrN/ZrN Vacuum arc
deposition
Substrate: silicon wafers and TiC,
Λ = 16 nm, µ = 565–577 nm, І = 70 A, PN =
= 8.6 ⋅ 10−1 Pa, ТS = 150°С, US = −100 V
Friction coefficient 0.41–0.45, wear
factor 3.62 ⋅ 10−7–4.26 ⋅ 10−4 mm3/Nm,
impact toughness K = 1.85–2.01 MPa ⋅ m1/2
Н = 28 GPa, Е = 267 GPa, H3/E2 =
= 0.11 GPa
J.-W. Lee
et al.,
2011 [33]
CrN/ZrN Vacuum arc
deposition
Substrate: silicon wafers and TiC, Λ = 5–
30 nm, µ = 511–677 nm, I = 70 A, PN =
= 8.6 ⋅ 10−1 Pa, TS = 150 °С, US = −100 V,
grain sizes 2.9–4.69 nm
Friction coefficient 0.17±0.05, wear factor
3.62⋅10−7–4.26 ⋅ 10−4 mm3/Nm, impact
toughness K = 1.88–2.15 MPa ⋅ m1/2
Н = 25.2 GPa,
Е = 282 GPa, H3/E2 = 0.3 GPa
Z.G. Zhang
et al.,
2009 [34]
CrN/ZrN Reaction
magnetron
sputtering
Substrate: silicon wafers and AISI M2 steel,
Λ = 11.7–66.7 nm, µ = 1.9–2.1 µm, PN =
= 5 ⋅ 10−4 Pa, US = −60 V, quantity of layers
30–180
Friction coefficient 0.32–0.54, wear
factor 5.5 ⋅ 10−7 mm3/Nm
Н = 29 GPa, Е = 256 GPa
N. San-
chez et al.,
2008 [35]
CrN/ZrN High-fre qu-
ency mag-
netron sput-
tering
Substrate: AISI 420 steel, Λ = 100–1000 nm,
µ = 3 µm, PN = 6.6 ⋅ 10−3 mbar, ТS = 250 °С,
US = −60 V, grain sizes 39–99 nm, quantity
of bilayers 1, 8, 15, and 30
Friction coefficient 0.32–0,54
S.-Y. Lee
et al.,
2008 [36]
CrN/ZrN Unbalanced
magnetron
sputtering
Substrate AISI H13 steel, Λ = 2.1–7.1 nm,
PN = 3.3 ⋅ 10−3 Torr, ТS = 150 °С, US = −100
V, grain sizes 6.2–9.4 nm, substrate rotation
speed 3, 6, and 15 rpm
Wear factor 0.74 ⋅ 10−6 mm3/Nm Н = 28.1–31.8 GPa, Е = 290–321 GPa,
H3/E2 = 0.19–0.31
D.J. Li et
al., 2007
[37]
CrN/ZrN Magnetron
sputtering
Substrate: Si, Λ = 2.2–3.6 nm, µ = 1–1.2 µm,
PN = 0.26 Pa, ТS = 250 °С, US = –200 V, sub-
strate rotation 4–11 rpm
Failure load 85 mN, wear factor
0.38 ⋅ 10−5 mm3/Nm
Н = 32 GPa
D.J. Li et
al., 2006
[38, 39]
CrN/ZrN Dc mag net-
ron sputter-
ing
Substrate: silicon wafers, µ = 800–1000 nm,
PN = 0.28 Pa, ТS = 200 °С, US = −200 V, sub-
strate rotation speed 13 rpm
Failure load 100 mN Н = 48.39–56.47 GPa, E = 381 GPa
D.J. Li et
al., 2004
[40]
CrN/ZrN Dc mag net-
ron sputter-
ing
Substrate: silicon wafers, PN = 0.28 Pa Н = 48.39–56.47 GPa, Е = 381 GPa
30 ISSN 1608-1021. Prog. Phys. Met., 2018, Vol. 19, No. 1
O.V. Maksakova, O.D. Pogrebnjak, and V.M. Beresnev
mium and zirconium nitrides form. Authors predict that introduction
of some amount of NH3 into the reaction gas during the deposition will
contribute to improving the properties of the created coatings. In wit-
ness of that, NH3 was introduced into the deposition chamber. The flow
rate of NH3 was varied from 0.15 to 0.55 cm3/min, while the flow rate
for N2 was unchanged being equal to 0.6 cm3/min. The diffraction pat-
terns clearly show significant peak for CrN(111) and weak peaks for
ZrN (111), Cr2N (112), and ZrN (220). Studying of the physical and me-
chanical properties of the obtained coatings showed that the systems
possess increased nanohardness (55 GPa) and elastic modulus (381 GPa)
in comparison to the ZrN (22.5 GPa) and CrN (27.5 GPa) mononitride
coatings as well as to the CrN/ZrN coatings formed at a flow of N2
(48.39 GPa). That is why they are especially promising for application
as the protective barrier coatings.
The functional properties of nitride coatings depend on their actu-
ally created structure (grain size, phase composition, internal stresses,
etc.); therefore, many researches currently study correlation between
structural-phase state and service properties of the coatings depending
on methods and conditions of their obtaining. Performing the long-term
testing, authors [33] investigated an effect of Cr/Zr relation on mecha-
nical and tribological properties of multilayer CrN/ZrN coatings. The
films with different content of chromium and zirconium (1–2.5) were
deposited onto the silicon wafer and carbide titanium substrates by the
arc-cathode deposition method. Total thickness of the films was the
same—circa 16 µm. Optimal conditions for mechanical and adhesion
properties (Н = 28.8 GPa, E = 267 GPa, K = 1.85 MPa ∙ m1/2), high resis-
tance to the plastic deformation (H3/E2 = 0.11), and quite well tribo-
logical indices (friction coefficient 0.45, wear factor 4.26 ∙ 10– 4 mm3/Nm)
were reached for Cr/Zr equal to 2.7.
Considerable results dealing with possibility of the structural engi-
neering in multilayer arc-vacuum CrN/ZrN coatings were presented by
O.V. Sobol et al. [29–31]. They established a possibility to reach a super-
hard state in the multilayer coatings of circa 20 nm thick using the
pulsed bias potential. The authors showed the presence of atomic order-
ing due to the high mobility and decreasing the interboundary mixing
in the films. Negative potential results to the formation of solid solu-
tions during deposition due to inter-boundary mixing. Hardness of such
systems does not exceed 30 GPa, however in case of an impulse high-
voltage action (pulse duration of 10 µs, repetition frequency of 7 kHz, am p-
litude of 800 V), authors reached a super-hardness effect (up to 42 GPa)
at the nanometre-thick layers.
Thus, literature data [29–40] show that chromium- and nitride-ba-
sed films act as a unique basis for layered materials. They can possess
improved physical, chemical, mechanical, and tribological properties
ISSN 1608-1021. Usp. Fiz. Met., 2018, Vol. 19, No. 1 31
Features of Investigations of Multilayer Nitride Coatings Based on Cr and Zr
due to the reaching of appropriate functional features, viz. (periodic)
thickness of the layers, gas atmosphere pressure, and energy factor de-
fined by the bias potential during the deposition.
Below, we go into details of these works [29–40]. We review the
structure and properties of the most promising, on our opinion, zirco-
nium- and chromium-nitride-based nanocomposite coatings with differ-
ent technological conditions during the deposition.
results and discussions
Microstructure and composition of crn/zrn coatings
Analyzing literature data, we established that there are the general
regularities and features for given class of coatings in their morphology
independently on conditions of the film formations. Figure 1 represents
the scanning electron microscopy (SEM) fractographs for surface and
lateral cleavage of CrN/ZrN coating with a layer thickness of about 300
nm. There is an insignificant amount of micro-drop fraction on the sur-
face and its practical absence on the cross-section of the coating. The
structure demonstrates a sufficiently high homogeneity of the layers
along the thickness and quite well planarity.
The high coating continuities and columnar structure are shown in
Fig. 2. One can clear see that the coating repeats the substrate surface
relief. There were not detected the delaminated or crumbled out coating
areas. There is a compact coating structure and clearly observed bound-
ary between the coating and the substrate, which probably should affect
the increase of adhesion of the coating and the substrate. The layered
structure of films in multilayer structures can remain unbreakable for
several millimetres [41–43], which is much more than their extremely
small thickness (several nanometres).
The coatings obtained via the arc-vacuum deposition methods can
have different phase and defect structures. However, their grain struc-
ture is represented by columnar crystals, which are directed from tran-
sition layer to the coating surface either vertically or angularly to the
surface [44–47]. Authors [38] observed columnar microstructure of
CrN/ZrN coatings deposited on the silicon substrates by dc magnetron
sputtering. In the work [36], the coatings obtained by the unbalanced
magnetron sputtering on the steel substrate have a columnar structure
as well. Photomicrographs of the lateral section of the CrN/ZrN films
obtained by the scanning electron microscopy for lower and higher reso-
lutions are represented in Fig. 3.
Atomic force microscopy (AFM) images for CrN/ZrN coating sur-
faces (Fig. 4) showed that the compositions have a well-developed, fine-
grained surface relief; there are both eminences and valleys. Surface ima-
ges indicates that depending on bilayer thickness the roughness values
32 ISSN 1608-1021. Prog. Phys. Met., 2018, Vol. 19, No. 1
O.V. Maksakova, O.D. Pogrebnjak, and V.M. Beresnev
Fig. 3. The cross-sectional transmission electron microscopy (TEM) micrographs of
the multilayer CrN/ZrN with bilayer thickness of 5 nm for lower (a) and higher (b)
magnifications [33]
Fig. 2. SEM surface morphologies for the lateral surface of the multilayer CrN/ZrN
coatings obtained at PN = 8.6 ⋅ 10−1 Pa, ТS = 150 °С, US = −100 V with different bi-
layer thickness (Λ): 16 nm (a) [32] and 6 nm (b) [33]
Fig. 1. The scanning electron microscopy (SEM) images of nanocomposite
ZrN/CrN coating with a modulation period of 300 nm obtained for surface
(a) and fracture (b) when PN = 4 ⋅ 10−3
Тоrr, ТS = 250–350 °С, US = −150 V [30]
ISSN 1608-1021. Usp. Fiz. Met., 2018, Vol. 19, No. 1 33
Features of Investigations of Multilayer Nitride Coatings Based on Cr and Zr
vary from 1.9 to 4.4 ± 0.5 nm. Probably relief inhomogeneity is attrib-
uted to the presence of macrodefects on the surface and growth of the
nitride phase in the coatings [48–50]. Investigations showed that the
Fig. 5. Composition depth profile for multilayer CrN/ZrN coatings obtained at PN =
= 3.3 ⋅ 10−3 Torr, ТS = 150 °С, US = −100 V with different bilayer thickness (Λ):
7.1 nm (a) and 2.1 nm (b) [36]
Fig. 4. The 1.0 × 1.0 µm AFM images of CrN/ZrN coatings with bilayer thickness (Λ)
of 3 µm (a), 375 µm (b), 200 nm (c), and 100 nm (d) [35]
34 ISSN 1608-1021. Prog. Phys. Met., 2018, Vol. 19, No. 1
O.V. Maksakova, O.D. Pogrebnjak, and V.M. Beresnev
Fig. 6. X-ray diffraction patterns for monolayer CrN and ZrN, as well as multilayer
CrN/ZrN coatings obtained at PN = 5 ⋅ 10−4 Pa, US = –60 V [34]
ISSN 1608-1021. Usp. Fiz. Met., 2018, Vol. 19, No. 1 35
Features of Investigations of Multilayer Nitride Coatings Based on Cr and Zr
smallest surface roughness, ≈1.9 ± 0.5 nm, is for 100 nm thick bilayer,
and the smallest grain size, ≈39 ± 4 nm, is for 375 nm thick bilayer.
The Auger spectroscopy-profiling images (see curves shown in
Fig. 5) are the uniform depth distributions of the base elements of the
composite multilayer coating.
X-ray diffraction analysis of the structure and phase composition of
CrN/ZrN coatings are carried out in typical works [33, 34, 36]. Figure 6
represents X-ray diffraction pattern for multilayer CrN/ZrN samples
(with different modulation period) as well as single-layer CrN and ZrN
film structures. According to the results for monolayer CrN coating with
a B1 structure, the preferred plane is (200), and diffraction peaks (111)
and (200) have moderate and weak intensity, respectively. The ZrN coat-
ings possess a preferred orientation of (111) and very weak reflection
(222). The analysis of X-ray diffraction for monolayer CrN/ZrN film
structure revealed formation of the (111) preferred orientation. Based
on the intensity of the reflections in the films, one can judge the pres-
ence of a critical level of internal stresses, which are typical for the
coatings obtained by the arc-vacuum deposition method [30, 51, 52].
Fig. 7. Regions of diffraction spectra obtained when PN = 4 ⋅ 10−3 Torr, US = −150 V,
UІ = −800 V for coatings with different bilayer thickness: 300 nm (1), 120 nm (2),
80 nm (3), 40 nm (4), and ≈ 20 nm (5) [31]
36 ISSN 1608-1021. Prog. Phys. Met., 2018, Vol. 19, No. 1
O.V. Maksakova, O.D. Pogrebnjak, and V.M. Beresnev
As the thickness of bilayers decreases, the reflections for CrN per-
manently shift to the side of smaller angles. The ZrN (111) diffraction
maximum practically is not changeable as the bilayer decreases to 35
nm. With a further decrease in the modulation period, the peak sub-
stantially broadens and shifts toward a higher diffraction angle. The
observed shift is apparently attributed to decrease in the grain sizes and
degree of crystallinity, which agree with Refs. [32, 33].
When bilayer thickness reaches 11.7 nm, the X-ray diffraction pattern
shows a preferred CrN with (111) reflection, i.e. as the modulation pa-
rameter (Λ) decreases, multilayer structure transforms into the ‘super-
lattice structure’ state with a single lattice parameter. This is seen from
a single peak with satellites on the diffraction pattern. The peak corre-
sponds to d = 2.45 Е, which is an average between the interplanar distance
d(111) of zirconium nitride and d(111) of chromium nitride. Something like
that has already been observed in multilayer structures and it is consid-
ered very promising to use multilayer films with ultrathin layers [53, 54].
In a series of works [29–31, 33], the Cr2N and CrN phases with dif-
ferent proportions appear in the nitride chromium layers. The appear-
ance of such two-phase composition authors [29–31] attribute to im-
pulse high-voltage action applied to the substrate during the arc-vacuum
process of the coating formation. The constant negative potential was
varied from –70 V to –150 V. According to Ref. [38], the reason for the
Cr2N phase to be arisen is the N2 + NH3 mixture to be used as a reaction
gas. The stoichiometry of coatings also depends on the reaction gas’
flow rate. At that, the working pressure in the chamber was circa
0.28 Pa. The regions of the diffraction spectra for such coatings are
depicted in Fig. 7.
One can see that for both technologies, the base parameter defining
precipitation or absence of the Cr2N phase is rather an energy factor
(defined by the applied bias potential [58, 59]) and working medium than
the partial pressure of reaction gas [55–57]. Moreover, as it will be shown
further during analysis of the results, the Cr2N phase can contribute to
improving the mechanical properties of the coatings [31, 39].
Taking into account results of all works dealing with the study of
multilayer CrN/ZrN coatings, we have to note a substantial dependence
of the structure and kinetics of the films’ formation on the technologi-
cal parameters during their formation.
Mechanical Properties of Multilayer crn/zrn coatings
For optimization of the mechanical properties of coatings, the ascertain-
ment of the relationship between the structure and their properties is
an important challenge. Hardness is one of the most researched param-
eters of any coatings, including multi-layer ones.
ISSN 1608-1021. Usp. Fiz. Met., 2018, Vol. 19, No. 1 37
Features of Investigations of Multilayer Nitride Coatings Based on Cr and Zr
A relationship between conditions of the deposition process and
hardness of CrN/ZrN coating was determined. Within the range of lay-
er thicknesses of 20–300 nm, the maximal value of hardness was circa
42 GPa as Fig. 8 represents. This maximum value corresponds to the
coatings produced without a permanent negative bias potential, but with
impulse stimulation and the smallest layer thickness of 20 nm. Thus,
using of the impulse high-voltage impaction (8% of a total deposition
time) for elevation of mobility of deposited atoms does not result to
formation of solid-solution phases, probably, due to the possibility of
atomic ordering (as in other bulky [60, 61] or plane [62, 63] crystals)
during remaining (without impact) time interval (92% of total time).
As the negative potential of −70 V and −150 V is applied, the maximal
hardness decreases to 33 and 32 GPa, respectively, and the dependence
changes its behaviour (Fig. 8). For the smallest thickness (when an in-
fluence of potential, which enhances an average energy of deposited
particles, on the radiation-stimulated inter-layer mixing is maximal),
the lowest values (circa 30 GPa) are reached, while midvalues (about
32–33 GPa) occur at a layer thickness exceeding 100 nm. Note that au-
thors revealed dependence between the hardness and structural charac-
teristics of CrN/ZrN coatings, such as a texture, a crystal lattice pa-
rameter, and a size of the crystalline grains.
Thus, the effect of improving mechanical properties with decreasing
layer thicknesses to nanometre size in a multilayer composition can be
realized in the case of low mixing at the interphase boundary of the lay-
ers, which for highly differentiated metal masses composing the multi-
layer system can be achieved with a low bias potential.
Fig. 9. The hardness (Н), elastic modulus (Е), and plastic deformation resistance
(H3/E2) vs. the bilayer periods (Λ) for the CrN/ZrN multilayered coatings on Si
substrates obtained at PN = 8.6 ⋅ 10−1 Pa, US = −100 V, TS = 150 °C via the arc-PVD
technique [33]
Fig. 8. Dependence of hardness H on the layer thickness h in ZrN/CrN multilayer
coating produced at PN = 4 ⋅ 10−3 Torr and pulsed stimulation of deposition UI = –800 V
for two cases: without (1) and with application of a constant voltage US = −150 V (2)
[31]
38 ISSN 1608-1021. Prog. Phys. Met., 2018, Vol. 19, No. 1
O.V. Maksakova, O.D. Pogrebnjak, and V.M. Beresnev
According to the findings in the works [32, 33, 36], values of hard-
ness H, elastic modulus E, and plastic deformation H3/E2 for CrN/ZrN
coatings depend on bilayer thicknesses. Figure 9 represents dependenc-
es for these parameters and their comparison with monolayer nitrides.
Along with a high hardness, the coatings possess a high elastic modu-
lus. The relation H3/E2 characterizes an ability of coating material to
counteract to the plastic deformation and is called as the plastic defor-
mation resistance index. The higher value of H3/E2, the material is
more resistant to the plastic deformation [64–67]. In the range of in-
vestigated bilayer thicknesses (Λ = 16–30 nm), the maximal values of
hardness (25.2 GPa), elastic modulus (282 GPa), and plastic deforma-
tion (0.3 GPa) are observed for Λ = 16 nm. It is well known that hard-
ness, increasing to the maximum value, and then decreasing as the bi-
layer thickness increases, is a typical phenomenon observed in multi-
layer coatings [68–70]. In such multilayer systems, the mechanism of
hardness increase can be explained by Koehler’s theory [71] or the
hardening theory [72, 73], which is based on the dislocation blocking at
interfaces.
In the works [39, 40], authors estimated mechanical characteristics
of coating surfaces via determination of nanohardness and elastic mod-
ulus as well as their correlation with type of reaction gas and its flow
rate during the coating formation. A mixture N2 + NH3 acts as a reac-
tion gas, and its delivery rate, when hardness and elastic modulus are
maximal (55 and 381 GPa, respectively), is 0.23 cm3/min (see Fig. 10).
These magnitudes 1–1.5 times exceed values of hardness for mononi-
tride CrN and ZrN coatings, and 0.4 times values of hardness obtained
by other research groups [34, 36]. There is an explicit dependence of
mechanical properties for CrN/ZrN coatings on conditions of their for-
mation. Authors analyze structural-phase state of the coatings and be-
lieve that an addition of hydrogen nitride results to increase in crystal-
linity degree of coatings and formation of nanocrystallites. Thus, the
fraction of grain boundaries is also significantly increased. The grain
Fig. 10. Nanoindentation hardness
(H) vs. the flow rate of N2 and N2 +
NH3 reaction gases obtained for PN =
= 2.8 ⋅ 10−1 Pa, US = −200 V, TS =
= 200 °C via dc magnetron sputtering
of multilayer CrN/ZrN coatings on Si
substrates [38]
ISSN 1608-1021. Usp. Fiz. Met., 2018, Vol. 19, No. 1 39
Features of Investigations of Multilayer Nitride Coatings Based on Cr and Zr
boundaries in nanocrystalline materials are an obstacle to plastic defor-
mation, which contributes to the hardening of the material [74–76].
Thus, we analyzed the correlation between the parameters in ex-
periments and the hardness of the coatings. From this analysis, we can
assert that in order to achieve the maximum hardness of multilayered
CrN/ZrN coatings, it is necessary to strive for the formation of a per-
fect phase structure with the minimum possible grain size and optimal
thickness of bilayers.
corrosion resistance of Multilayer crn/zrn coatings
The quantitative evaluation of the corrosion resistance of coatings is a
difficult problem, since the service life is determined by both the prop-
erties of the coating and external conditions.
Work [35] deals with studying of electrochemical properties of mul-
tilayer CrN/ZrN coatings produced at PN = 0.66 Pa, US = −60 V, TS =
= 250 °C on the steel substrates by the high-frequency magnetron sput-
tering technique using electrochemical impedance spectroscopy. Corro-
sion tests were carried out for 3.5% solution of NaCl at a room tem-
perature. Potentials for samples (Е) were measured with respect to sil-
ver chloride electrode. Electrode working surface was 1 cm2. Platinum
wafer served as an auxiliary electrode. Impedance measurements were
carried out in the potential range ±250 mV. To calculate the corrosion
current, the polarization resistance Rр was used via the equation [77]
cor 2.303 ( )
c
p c
I
R
α
α
β β
=
β + β
,
where βα and βc are the Tafel anode and cathode constants, respectively.
To determine Rр, the current–voltage characteristic near the corro-
sion potential was measured via polarization along cathode and anode
directions, while Rр value was calculated by the slope angle of curve at
the corrosion potential (∆E → 0) [78–80]. Analysis of electrochemical
parameters in Table 2 indicates
that modulation period of coat-
ings affects on their resistance
to corrosion. The Tafel curves
presented in Fig. 11 confirm a
high corrosion resistance (circa
23 µm/hour).
Figure 12 represents surface
images of CrN/ZrN films after
Fig. 11. Tafel polarization curves for
CrN/ZrN films with 1, 8, 15, and 30
bilayers [35]
40 ISSN 1608-1021. Prog. Phys. Met., 2018, Vol. 19, No. 1
O.V. Maksakova, O.D. Pogrebnjak, and V.M. Beresnev
electrochemical tests. As the 100–200 nm thick bilayers get decrease in
their thickness, we can observe that corrosion attack does not affect
surface of the films. There no considerable changes in these coatings
after their subjection to corrosive wear.
Thus, based on the analysis of the corrosion behaviour of CrN/ZrN
films in 3.5% aqueous NaCl solution, the corrosion characteristics of
the coatings are determined. The relationship between these character-
istics and nanometre-thick layers in the multilayer composition is also
established.
Fig. 12. Micrograph for surface of CrN/ZrN coatings after electro-
chemical analysis [35]
Table 2. Electrochemical analysis results of resistance to corrosion
for CrN/ZrN coatings in 3.5% water-distilled NaCl solution
Parameter
Value
Substrate
Modulation period
3 µm 375 nm 200 nm 100 nm
βα, V/decade 496.6 ⋅ 10−3 128.1 ⋅ 10−3 132.6 ⋅ 10−3 323.6 ⋅ 10−3 62.5 ⋅ 10−3
βс, V/decade 270.8 ⋅ 10−3 190.6 ⋅ 10−3 185.2 ⋅ 10−3 540.5 ⋅ 10−3 102.8 ⋅ 10-3
Іcor 40.5 3.74 3.37 1.8 17.6
Еcor (mV) −748 −338 −339 −240 −280
Vcor, m/hour 12.43 2.209 2.228 924.6 ⋅ 10−3 8.062 ⋅ 10−3
ISSN 1608-1021. Usp. Fiz. Met., 2018, Vol. 19, No. 1 41
Features of Investigations of Multilayer Nitride Coatings Based on Cr and Zr
tribological Properties of Multilayer crn/zrn coatings
Problems of tribology are discussed in numerous publications in the
scientific and technical literature, many aspects of friction and wear
processes are considered, however, the number of publications on the
friction and wear of nanoscale multilayer CrN/ZrN coatings is current-
ly limited. Tribological characteristics are predictably correlated with
the structure of coatings and their mechanical properties. As a rule,
coatings with the highest possible hardness and minimum friction coef-
ficient have the lowest wear [81–85].
The authors [38–40] obtained important practical results on fric-
tion, wear, and destructive loading. As a deposition method, magnetron
Fig. 13. Wear rate and friction co-
efficient vs. estimated modulation
period Λ obtained at PN = 2.6 ⋅ 10−1
Pa, US = −200 V, TS = 200 °C for
the CrN/ZrN coatings [37]
Fig. 14. Surface profiles of the
scratch scan and post scan along
with the scratch tracks images of
the multilayer CrN/ZrN coatings
[39]
►
42 ISSN 1608-1021. Prog. Phys. Met., 2018, Vol. 19, No. 1
Fig. 15. The AFM micrographs of the Vickers indenta-
tion print for the CrN/ZrN coatings obtained on steel
substrates via magnetron sputtering for PN = 0.66 Pa,
US = −60 V, TS = 250 °C [35]
O.V. Maksakova, O.D. Pogrebnjak, and V.M. Beresnev
sputtering at a constant current was used, and silicon wafers served as
substrates. Wear measurements were carried out according to the ‘ball–
disk’ scheme at a temperature of 23 °C. As a counter body, a Si3N4 ce-
ramic ball was used. The test load was 2 N, and the sliding speed was
1000 rpm. The diameter of the friction track was of 5 mm.
Figure 13 shows dependences of friction coefficient and wear rate
for the samples with different modulation period. Measured experimen-
tal data indicate that the wear coefficient of multilayer coating with
mo du lation period of 1.5 nm reaches value of 0.3865 ⋅ 10−5 mm3/Nm
that is 6–24 times higher as compared to the value for multilayer CrN
and ZrN.
A scratch test was used to analyze the adhesion strength of the coat-
ings that were obtained. The method is based on scratching the surface
of the coating when the indenter is loaded uninterruptedly. The research
is based on scratching the surface of the coating, under continuous load-
ing of the indenter. The indentation depth was 10–15% of total coating
thickness (800 nm–1 µm).
Figure 14 represents a scratch-scan before and after conduction of
the tests, as well as images of the coating regions after they were tested.
The results are compared with those for the mononitride ZrN and CrN
coatings. The first appearance of cracks attributed to cohesive failure of
the coating was recorded at loads more than 50 mN. However, it was
noted that the appearance of cracks had a single nature. There were no
indications of adhesion failure up to the loads greater than 85 mN. The
critical load for adhesive failure was 100 mN.
A typical deformation image that occurs in the impression of the
Vickers pyramid on the surface of the CrN/ZrN coating is shown in Fig. 15.
ISSN 1608-1021. Usp. Fiz. Met., 2018, Vol. 19, No. 1 43
Features of Investigations of Multilayer Nitride Coatings Based on Cr and Zr
Studies of traces of the indenter showed the dependences of resistance
to the failure on the modulation period (Λ) in the films. As the thickness
of 100–200 nm thick coatings decreases, there is an increasing of fail-
ure resistance. Such a result is achieved also due to the layering and
nanostructuring of the films.
Thus, despite the fact that the conditions and technologies of the
coating depositions differ significantly, we can formulate a general con-
clusion that the tribological properties of multilayer CrN/ZrN coatings
are directly related to the conditions of experimental operations.
conclusion
Determination of the properties of nitride Cr- and Zr-based multilayer
coatings is impossible without reliable identification of their phase and
structural states associated with methods and deposition regimes. The
enhancement of possibilities and expansion of areas of application of
these films is possible via optimization of the deposition process, cre-
ation of technological conditions for the process of the structural for-
mation of nanoscale films with the required complex of properties. The
executed analysis of the structural-phase, mechanical, corrosion, and
tribological characteristics of multilayer CrN/ZrN coatings enabled us
to make some general conclusions.
• The techniques of formation of multilayer coatings require infor-
mation on basic parameters determining their structure, phase composi-
tion and properties. These parameters are as follows: the value and
shape of the applied bias potential, the pressure of the working atmo-
sphere, the selection of the reaction gas and its flow rate. The tempera-
ture does not affect substantially the morphology of the compositions.
• We revealed that a decrease in the period of multilayer structures
increases their hardness, whose absolute value is determined not only by
the phase composition but also by the grain size in the alternate layers, the
volume fraction of the interlayer boundaries and the near-boundary areas,
the level of internal stresses in the composition and the energy factor dur-
ing deposition. The hardness of the obtained compositions can be signifi-
cantly higher in comparison to the hardness of single-layer materials.
• Enhancement of the wear resistance of multilayer systems is as-
sociated with a decrease in the friction coefficient, the formation of
coatings with a low compressive stresses, sufficiently high hardness,
and good adhesion.
The generalized experimental data give a possibility to make a goal-
directed influence on the structure, phase composition, as well as phys-
ical and mechanical characteristics of coatings, which are one of the
most important and promising among current trends in obtaining of
new (quasi-two-dimensional) materials.
44 ISSN 1608-1021. Prog. Phys. Met., 2018, Vol. 19, No. 1
O.V. Maksakova, O.D. Pogrebnjak, and V.M. Beresnev
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Features of Investigations of Multilayer Nitride Coatings Based on Cr and Zr
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Received November 28, 2017;
in final version, March 26, 2018
О.В. Максакова, О.Д. Погребняк
Сумський державний університет,
вул. Римського-Корсакова, 2, 40007 Суми, Україна
Sumy State University, 2 Rymsky-Korsakov Str., UA-40007 Sumy, Ukraine
В.М. Береснєв
Харківський національний університет імені В.Н. Каразіна,
пл. Свободи, 4, 61022 Харків, Україна
ОСОБЛИВОСТІ ДОСЛІДжЕНЬ БАГАТОШАРОВИХ
НІТРИДНИХ ПОКРИТТІВ НА ОСНОВІ Cr І Zr
У короткому огляді літературних даних узагальнено результати досліджень
структури та властивостей наномасштабних багатошарових покриттів тяжко-
топких металів на основі Zr та Cr, одержаних методами вакуумно-дугового оса-
дження катоди. Проведено порівняльну аналізу мікроструктури та властивостей
композиційних покриттів ZrN/CrN, залежно від умов осадження (постійного не-
ґативного потенціялу підложжя, імпульсного високовольтного потенціялу змі-
щення, парціяльного тиску, швидкости потоку робочого газу) та періоду модуля-
ції багатошарової структури. Виявлено загальні закономірності, що полягають у
наявності стовпчастої структури та текстури росту. Показано, що для досліджу-
ваних покриттів має місце переважна орієнтація (111). Визначено умови одер-
жання поліпшених фізико-механічних і трибологічних властивостей покриттів.
Ключові слова: багатошарові покриття, структура, твердість, корозійна стій-
кість, зношування.
48 ISSN 1608-1021. Prog. Phys. Met., 2018, Vol. 19, No. 1
O.V. Maksakova, O.D. Pogrebnjak, and V.M. Beresnev
О.В. Максакова, О.Д. Погребняк,
Сумский государственный университет,
ул. Римского-Корсакова, 2, 40007 Сумы, Украина
В.М. Береснєв
Харьковский национальный университет имени В.Н. Каразина,
пл. Свободы, 4, 61022 Харьков, Украина
ОСОБЕННОСТИ ИССЛЕДОВАНИЙ МНОГОСЛОЙНыХ
НИТРИДНыХ ПОКРыТИЙ НА ОСНОВЕ Cr И Zr
В кратком обзоре литературных данных обобщены результаты исследований
структуры и свойств наномасштабных многослойных покрытий нитридов туго-
плавких металлов на основе Zr и Cr, полученных методами вакуумно-дугового
осаждения катода. Проведён сравнительный анализ микроструктуры и свойств
композиционных покрытий ZrN/CrN в зависимости от условий осаждения (по-
стоянного или импульсного отрицательного потенциала подложки, импульсного
высоковольтного потенциала смещения, парциального давления, скорости пото-
ка рабочего газа) и периода модуляции многослойной структуры. Выявлены об-
щие закономерности, состоящие в наличии столбчатой структуры и текстуры
роста. Показано, что для исследуемых покрытий имеет место преимущественная
ориентация (111). Установлены условия получения улучшенных физико-механи-
ческих и трибологических характеристик покрытий.
Ключевые слова: многослойные покрытия, структура, твердость, коррозион ная
стойкость, износ.
|
| id | nasplib_isofts_kiev_ua-123456789-167902 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1608-1021 |
| language | English |
| last_indexed | 2025-12-07T13:29:19Z |
| publishDate | 2018 |
| publisher | Інститут металофізики ім. Г.В. Курдюмова НАН України |
| record_format | dspace |
| spelling | Maksakova, O.V. Pogrebnjak, O.D. Beresnev, V.M. 2020-04-14T19:42:43Z 2020-04-14T19:42:43Z 2018 Features of Investigations of Multilayer Nitride Coatings Based on Cr and Zr / O.V. Maksakova, O.D. Pogrebnjak, V.M. Beresnev // Progress in Physics of Metals. — 2018. — Vol. 19, No 1. — P. 25-48. — Bibliog.: 85 titles. — eng. 1608-1021 PACS: 62.20.Qp, 62.25.-g, 68.55.-a, 68.65.Ac, 81.65.Kn DOI: https://doi.org/10.15407/ufm.19.01.02 https://nasplib.isofts.kiev.ua/handle/123456789/167902 The studies of the structure and properties of nanoscale multilayer coatings of Zr- and Cr-based refractory metals obtained by the vacuum arc cathode deposition are summarized in a brief review of the literature data. A comparative analysis of the microstructure and properties of ZrN/CrN composite coatings depending on the deposition conditions (constant negative potential of the substrate, pulsed high-voltage bias potential, partial pressure, reaction gas velocity) and modulation period for multilayered structure is carried out. General regularities consisting in the presence of the columnar structure and the growth texture are revealed. They show that there is a prevailing (111) orientation for investigated coatings. Conditions for obtaining improved physical, mechanical, and tribological properties of the coatings are determined. В кратком обзоре литературных данных обобщены результаты исследований структуры и свойств наномасштабных многослойных покрытий нитридов тугоплавких металлов на основе Zr и Cr, полученных методами вакуумно-дугового осаждения катода. Проведён сравнительный анализ микроструктуры и свойств композиционных покрытий ZrN/CrN в зависимости от условий осаждения (постоянного или импульсного отрицательного потенциала подложки, импульсного высоковольтного потенциала смещения, парциального давления, скорости потока рабочего газа) и периода модуляции многослойной структуры. Выявлены общие закономерности, состоящие в наличии столбчатой структуры и текстуры роста. Показано, что для исследуемых покрытий имеет место преимущественная ориентация (111). Установлены условия получения улучшенных физико-механических и трибологических характеристик покрытий. У короткому огляді літературних даних узагальнено результати досліджень структури та властивостей наномасштабних багатошарових покриттів тяжкотопких металів на основі Zr та Cr, одержаних методами вакуумно-дугового осадження катоди. Проведено порівняльну аналізу мікроструктури та властивостей композиційних покриттів ZrN/CrN, залежно від умов осадження (постійного неґативного потенціялу підложжя, імпульсного високовольтного потенціялу зміщення, парціяльного тиску, швидкости потоку робочого газу) та періоду модуляції багатошарової структури. Виявлено загальні закономірності, що полягають у наявності стовпчастої структури та текстури росту. Показано, що для досліджуваних покриттів має місце переважна орієнтація (111). Визначено умови одержання поліпшених фізико-механічних і трибологічних властивостей покриттів. en Інститут металофізики ім. Г.В. Курдюмова НАН України Успехи физики металлов Features of Investigations of Multilayer Nitride Coatings Based on Cr and Zr Особенности исследований многослойных нитридных покрытий на основе Cr и Zr Особливості досліджень багатошарових нітридних покриттів на основі Cr і Zr Article published earlier |
| spellingShingle | Features of Investigations of Multilayer Nitride Coatings Based on Cr and Zr Maksakova, O.V. Pogrebnjak, O.D. Beresnev, V.M. |
| title | Features of Investigations of Multilayer Nitride Coatings Based on Cr and Zr |
| title_alt | Особенности исследований многослойных нитридных покрытий на основе Cr и Zr Особливості досліджень багатошарових нітридних покриттів на основі Cr і Zr |
| title_full | Features of Investigations of Multilayer Nitride Coatings Based on Cr and Zr |
| title_fullStr | Features of Investigations of Multilayer Nitride Coatings Based on Cr and Zr |
| title_full_unstemmed | Features of Investigations of Multilayer Nitride Coatings Based on Cr and Zr |
| title_short | Features of Investigations of Multilayer Nitride Coatings Based on Cr and Zr |
| title_sort | features of investigations of multilayer nitride coatings based on cr and zr |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/167902 |
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