Control of planar magnetron sputtering system operating modes by additional anode magnetic field
The control of planar magnetron sputtering system operating modes by additional anode magnetic field was investigated. It was shown that additional anode magnetic field substantially affects to planar magnetron-sputtering system (MSS) balancing and allows adjusting the electron fluxes intensity to t...
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| Date: | 2010 |
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| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2010
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| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/17485 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Control of planar magnetron sputtering system operating modes by additional anode magnetic field / A.A. Bizyukov, O.I. Girka, K.N. Sereda, V.V. Sleptsov, A.G. Chunadra // Вопросы атомной науки и техники. — 2010. — № 6. — С. 144-146. — Бібліогр.: 3 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862631737905905664 |
|---|---|
| author | Bizyukov, A.A. Girka, O.I. Sereda, K.N. Sleptsov, V.V. Chunadra, A.G. |
| author_facet | Bizyukov, A.A. Girka, O.I. Sereda, K.N. Sleptsov, V.V. Chunadra, A.G. |
| citation_txt | Control of planar magnetron sputtering system operating modes by additional anode magnetic field / A.A. Bizyukov, O.I. Girka, K.N. Sereda, V.V. Sleptsov, A.G. Chunadra // Вопросы атомной науки и техники. — 2010. — № 6. — С. 144-146. — Бібліогр.: 3 назв. — англ. |
| collection | DSpace DC |
| description | The control of planar magnetron sputtering system operating modes by additional anode magnetic field was investigated. It was shown that additional anode magnetic field substantially affects to planar magnetron-sputtering system (MSS) balancing and allows adjusting the electron fluxes intensity to the operating surface. It was experimentally shown that the magnetic field intensity increasing stabilizes the low-current discharge. The magnetic field intensity increasing prevents the discharge extinction by the ignition of semi-self-maintained magnetron-type discharge in transverse anode magnetic field.
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| first_indexed | 2025-11-30T11:46:17Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-17485 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1562-6016 |
| language | English |
| last_indexed | 2025-11-30T11:46:17Z |
| publishDate | 2010 |
| publisher | Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| record_format | dspace |
| spelling | Bizyukov, A.A. Girka, O.I. Sereda, K.N. Sleptsov, V.V. Chunadra, A.G. 2011-02-26T22:24:01Z 2011-02-26T22:24:01Z 2010 Control of planar magnetron sputtering system operating modes by additional anode magnetic field / A.A. Bizyukov, O.I. Girka, K.N. Sereda, V.V. Sleptsov, A.G. Chunadra // Вопросы атомной науки и техники. — 2010. — № 6. — С. 144-146. — Бібліогр.: 3 назв. — англ. 1562-6016 https://nasplib.isofts.kiev.ua/handle/123456789/17485 The control of planar magnetron sputtering system operating modes by additional anode magnetic field was investigated. It was shown that additional anode magnetic field substantially affects to planar magnetron-sputtering system (MSS) balancing and allows adjusting the electron fluxes intensity to the operating surface. It was experimentally shown that the magnetic field intensity increasing stabilizes the low-current discharge. The magnetic field intensity increasing prevents the discharge extinction by the ignition of semi-self-maintained magnetron-type discharge in transverse anode magnetic field. This work was supported in part by The Foundation of Development & Modernization of Scientific and Educational Equipment of V.N. Karazin Kharkiv National University, project #29-10. en Національний науковий центр «Харківський фізико-технічний інститут» НАН України Низкотемпературная плазма и плазменные технологии Control of planar magnetron sputtering system operating modes by additional anode magnetic field Управление режимами работы планарной магнетронной распылительной системы дополнительным прианодным магнитным полем Article published earlier |
| spellingShingle | Control of planar magnetron sputtering system operating modes by additional anode magnetic field Bizyukov, A.A. Girka, O.I. Sereda, K.N. Sleptsov, V.V. Chunadra, A.G. Низкотемпературная плазма и плазменные технологии |
| title | Control of planar magnetron sputtering system operating modes by additional anode magnetic field |
| title_alt | Управление режимами работы планарной магнетронной распылительной системы дополнительным прианодным магнитным полем |
| title_full | Control of planar magnetron sputtering system operating modes by additional anode magnetic field |
| title_fullStr | Control of planar magnetron sputtering system operating modes by additional anode magnetic field |
| title_full_unstemmed | Control of planar magnetron sputtering system operating modes by additional anode magnetic field |
| title_short | Control of planar magnetron sputtering system operating modes by additional anode magnetic field |
| title_sort | control of planar magnetron sputtering system operating modes by additional anode magnetic field |
| topic | Низкотемпературная плазма и плазменные технологии |
| topic_facet | Низкотемпературная плазма и плазменные технологии |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/17485 |
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