Control of planar magnetron sputtering system operating modes by additional anode magnetic field
The control of planar magnetron sputtering system operating modes by additional anode magnetic field was investigated. It was shown that additional anode magnetic field substantially affects to planar magnetron-sputtering system (MSS) balancing and allows adjusting the electron fluxes intensity to t...
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| Дата: | 2010 |
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| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | English |
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2010
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| Онлайн доступ: | https://nasplib.isofts.kiev.ua/handle/123456789/17485 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Control of planar magnetron sputtering system operating modes by additional anode magnetic field / A.A. Bizyukov, O.I. Girka, K.N. Sereda, V.V. Sleptsov, A.G. Chunadra // Вопросы атомной науки и техники. — 2010. — № 6. — С. 144-146. — Бібліогр.: 3 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
nasplib_isofts_kiev_ua-123456789-17485 |
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dspace |
| spelling |
Bizyukov, A.A. Girka, O.I. Sereda, K.N. Sleptsov, V.V. Chunadra, A.G. 2011-02-26T22:24:01Z 2011-02-26T22:24:01Z 2010 Control of planar magnetron sputtering system operating modes by additional anode magnetic field / A.A. Bizyukov, O.I. Girka, K.N. Sereda, V.V. Sleptsov, A.G. Chunadra // Вопросы атомной науки и техники. — 2010. — № 6. — С. 144-146. — Бібліогр.: 3 назв. — англ. 1562-6016 https://nasplib.isofts.kiev.ua/handle/123456789/17485 The control of planar magnetron sputtering system operating modes by additional anode magnetic field was investigated. It was shown that additional anode magnetic field substantially affects to planar magnetron-sputtering system (MSS) balancing and allows adjusting the electron fluxes intensity to the operating surface. It was experimentally shown that the magnetic field intensity increasing stabilizes the low-current discharge. The magnetic field intensity increasing prevents the discharge extinction by the ignition of semi-self-maintained magnetron-type discharge in transverse anode magnetic field. This work was supported in part by The Foundation of Development & Modernization of Scientific and Educational Equipment of V.N. Karazin Kharkiv National University, project #29-10. en Національний науковий центр «Харківський фізико-технічний інститут» НАН України Низкотемпературная плазма и плазменные технологии Control of planar magnetron sputtering system operating modes by additional anode magnetic field Управление режимами работы планарной магнетронной распылительной системы дополнительным прианодным магнитным полем Article published earlier |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| title |
Control of planar magnetron sputtering system operating modes by additional anode magnetic field |
| spellingShingle |
Control of planar magnetron sputtering system operating modes by additional anode magnetic field Bizyukov, A.A. Girka, O.I. Sereda, K.N. Sleptsov, V.V. Chunadra, A.G. Низкотемпературная плазма и плазменные технологии |
| title_short |
Control of planar magnetron sputtering system operating modes by additional anode magnetic field |
| title_full |
Control of planar magnetron sputtering system operating modes by additional anode magnetic field |
| title_fullStr |
Control of planar magnetron sputtering system operating modes by additional anode magnetic field |
| title_full_unstemmed |
Control of planar magnetron sputtering system operating modes by additional anode magnetic field |
| title_sort |
control of planar magnetron sputtering system operating modes by additional anode magnetic field |
| author |
Bizyukov, A.A. Girka, O.I. Sereda, K.N. Sleptsov, V.V. Chunadra, A.G. |
| author_facet |
Bizyukov, A.A. Girka, O.I. Sereda, K.N. Sleptsov, V.V. Chunadra, A.G. |
| topic |
Низкотемпературная плазма и плазменные технологии |
| topic_facet |
Низкотемпературная плазма и плазменные технологии |
| publishDate |
2010 |
| language |
English |
| publisher |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| format |
Article |
| title_alt |
Управление режимами работы планарной магнетронной распылительной системы дополнительным прианодным магнитным полем |
| description |
The control of planar magnetron sputtering system operating modes by additional anode magnetic field was investigated. It was shown that additional anode magnetic field substantially affects to planar magnetron-sputtering system (MSS) balancing and allows adjusting the electron fluxes intensity to the operating surface. It was experimentally shown that the magnetic field intensity increasing stabilizes the low-current discharge. The magnetic field intensity increasing prevents the discharge extinction by the ignition of semi-self-maintained magnetron-type discharge in transverse anode magnetic field.
|
| issn |
1562-6016 |
| url |
https://nasplib.isofts.kiev.ua/handle/123456789/17485 |
| citation_txt |
Control of planar magnetron sputtering system operating modes by additional anode magnetic field / A.A. Bizyukov, O.I. Girka, K.N. Sereda, V.V. Sleptsov, A.G. Chunadra // Вопросы атомной науки и техники. — 2010. — № 6. — С. 144-146. — Бібліогр.: 3 назв. — англ. |
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2025-11-30T11:46:17Z |
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2025-11-30T11:46:17Z |
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