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Control of planar magnetron sputtering system operating modes by additional anode magnetic field

The control of planar magnetron sputtering system operating modes by additional anode magnetic field was investigated. It was shown that additional anode magnetic field substantially affects to planar magnetron-sputtering system (MSS) balancing and allows adjusting the electron fluxes intensity to t...

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Bibliographic Details
Date:	2010
Main Authors:	Bizyukov, A.A., Girka, O.I., Sereda, K.N., Sleptsov, V.V., Chunadra, A.G.
Format:	Article
Language:	English
Published:	Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2010
Subjects:	Низкотемпературная плазма и плазменные технологии
Online Access:	https://nasplib.isofts.kiev.ua/handle/123456789/17485
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Journal Title:	Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:	Control of planar magnetron sputtering system operating modes by additional anode magnetic field / A.A. Bizyukov, O.I. Girka, K.N. Sereda, V.V. Sleptsov, A.G. Chunadra // Вопросы атомной науки и техники. — 2010. — № 6. — С. 144-146. — Бібліогр.: 3 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine

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