Structure of Fe-Cu coatings prepared by the magnetron sputtering method
This work presents the results of our research concerning the synthesis of metallic Fe-Cu coatings by use of the magnetron sputtering method. The structure of the coatings synthesized during two modes of pulsed magnetron sputtering was compared . In our experiment the pulsed magnetron power supply g...
Saved in:
| Date: | 2010 |
|---|---|
| ISSN: | 1562-6016 |
| Main Authors: | , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2010
|
| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/17490 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Structure of Fe-Cu coatings prepared by the magnetron sputtering method / K. Nowakowska-Langier, K. Zdunek, R. Chodun, R. Nietubyc, R. Mirowski, J. Witkowski // Вопросы атомной науки и техники. — 2010. — № 6. — С. 159-161. — Бібліогр.: 7 назв. — англ. |
Institution
Digital Library of Periodicals of National Academy of Sciences of Ukraine| Summary: | This work presents the results of our research concerning the synthesis of metallic Fe-Cu coatings by use of the magnetron sputtering method. The structure of the coatings synthesized during two modes of pulsed magnetron sputtering was compared . In our experiment the pulsed magnetron power supply generated a series of pulses gated at 1kHz - standard pulsed mode (SPM) and 2 Hz - low frequency pulsed mode (LFPM). The analysis of the microstructure by means of SEM and TEM show that obtained coatings are characterized by nanocrystalline structure. Additionally the optical emission spectra (OES) during the copper and iron sputtering were measured.
|
|---|---|
| ISSN: | 1562-6016 |