Structure of Fe-Cu coatings prepared by the magnetron sputtering method
This work presents the results of our research concerning the synthesis of metallic Fe-Cu coatings by use of the magnetron sputtering method. The structure of the coatings synthesized during two modes of pulsed magnetron sputtering was compared . In our experiment the pulsed magnetron power supply g...
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| Дата: | 2010 |
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| Автори: | , , , , , |
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| Мова: | English |
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2010
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| Онлайн доступ: | https://nasplib.isofts.kiev.ua/handle/123456789/17490 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Structure of Fe-Cu coatings prepared by the magnetron sputtering method / K. Nowakowska-Langier, K. Zdunek, R. Chodun, R. Nietubyc, R. Mirowski, J. Witkowski // Вопросы атомной науки и техники. — 2010. — № 6. — С. 159-161. — Бібліогр.: 7 назв. — англ. |
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nasplib_isofts_kiev_ua-123456789-17490 |
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Nowakowska-Langier, K. Zdunek, K. Chodun, R. Nietubyc, R. Mirowski, R. Witkowski, J. 2011-02-26T22:42:09Z 2011-02-26T22:42:09Z 2010 Structure of Fe-Cu coatings prepared by the magnetron sputtering method / K. Nowakowska-Langier, K. Zdunek, R. Chodun, R. Nietubyc, R. Mirowski, J. Witkowski // Вопросы атомной науки и техники. — 2010. — № 6. — С. 159-161. — Бібліогр.: 7 назв. — англ. 1562-6016 https://nasplib.isofts.kiev.ua/handle/123456789/17490 This work presents the results of our research concerning the synthesis of metallic Fe-Cu coatings by use of the magnetron sputtering method. The structure of the coatings synthesized during two modes of pulsed magnetron sputtering was compared . In our experiment the pulsed magnetron power supply generated a series of pulses gated at 1kHz - standard pulsed mode (SPM) and 2 Hz - low frequency pulsed mode (LFPM). The analysis of the microstructure by means of SEM and TEM show that obtained coatings are characterized by nanocrystalline structure. Additionally the optical emission spectra (OES) during the copper and iron sputtering were measured. This work was supported by a grant no. 4743/B/T02/2009/37 from the State Committee for Scientific Research in Poland. en Національний науковий центр «Харківський фізико-технічний інститут» НАН України Низкотемпературная плазма и плазменные технологии Structure of Fe-Cu coatings prepared by the magnetron sputtering method Структура Fe-Cu-покрытий, нанесенных методом магнетронного распыления Article published earlier |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| title |
Structure of Fe-Cu coatings prepared by the magnetron sputtering method |
| spellingShingle |
Structure of Fe-Cu coatings prepared by the magnetron sputtering method Nowakowska-Langier, K. Zdunek, K. Chodun, R. Nietubyc, R. Mirowski, R. Witkowski, J. Низкотемпературная плазма и плазменные технологии |
| title_short |
Structure of Fe-Cu coatings prepared by the magnetron sputtering method |
| title_full |
Structure of Fe-Cu coatings prepared by the magnetron sputtering method |
| title_fullStr |
Structure of Fe-Cu coatings prepared by the magnetron sputtering method |
| title_full_unstemmed |
Structure of Fe-Cu coatings prepared by the magnetron sputtering method |
| title_sort |
structure of fe-cu coatings prepared by the magnetron sputtering method |
| author |
Nowakowska-Langier, K. Zdunek, K. Chodun, R. Nietubyc, R. Mirowski, R. Witkowski, J. |
| author_facet |
Nowakowska-Langier, K. Zdunek, K. Chodun, R. Nietubyc, R. Mirowski, R. Witkowski, J. |
| topic |
Низкотемпературная плазма и плазменные технологии |
| topic_facet |
Низкотемпературная плазма и плазменные технологии |
| publishDate |
2010 |
| language |
English |
| publisher |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| format |
Article |
| title_alt |
Структура Fe-Cu-покрытий, нанесенных методом магнетронного распыления |
| description |
This work presents the results of our research concerning the synthesis of metallic Fe-Cu coatings by use of the magnetron sputtering method. The structure of the coatings synthesized during two modes of pulsed magnetron sputtering was compared . In our experiment the pulsed magnetron power supply generated a series of pulses gated at 1kHz - standard pulsed mode (SPM) and 2 Hz - low frequency pulsed mode (LFPM). The analysis of the microstructure by means of SEM and TEM show that obtained coatings are characterized by nanocrystalline structure. Additionally the optical emission spectra (OES) during the copper and iron sputtering were measured.
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| issn |
1562-6016 |
| url |
https://nasplib.isofts.kiev.ua/handle/123456789/17490 |
| fulltext |
|
| citation_txt |
Structure of Fe-Cu coatings prepared by the magnetron sputtering method / K. Nowakowska-Langier, K. Zdunek, R. Chodun, R. Nietubyc, R. Mirowski, J. Witkowski // Вопросы атомной науки и техники. — 2010. — № 6. — С. 159-161. — Бібліогр.: 7 назв. — англ. |
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2025-11-24T04:59:09Z |
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