Influence of plasma nucleus form on radiation orientation in high-current pulse plasma diode
The factors accompanied the generation directed super-radiation in high-current pulse discharge in tin vapor are investigated. Basing on measurements of space distribution of radiation intensity and fixing of discharge evolution phases images it was shown that generation of directed super-radiation...
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Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2010
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| Cite this: | Influence of plasma nucleus form on radiation orientation in high-current pulse plasma diode / A.F. Tseluyko, V.T. Lazurik, D.L. Ryabchikov, A. Hassanein, V.I. Maslov, I.V. Borgun, I.N. Sereda // Вопросы атомной науки и техники. — 2010. — № 6. — С. 176-178. — Бібліогр.: 3 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1860266331010498560 |
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| author | Tseluyko, A.F. Lazurik, V.T. Ryabchikov, D.L. Hassanein, A. Maslov, V.I. Borgun, I.V. Sereda, I.N. |
| author_facet | Tseluyko, A.F. Lazurik, V.T. Ryabchikov, D.L. Hassanein, A. Maslov, V.I. Borgun, I.V. Sereda, I.N. |
| citation_txt | Influence of plasma nucleus form on radiation orientation in high-current pulse plasma diode / A.F. Tseluyko, V.T. Lazurik, D.L. Ryabchikov, A. Hassanein, V.I. Maslov, I.V. Borgun, I.N. Sereda // Вопросы атомной науки и техники. — 2010. — № 6. — С. 176-178. — Бібліогр.: 3 назв. — англ. |
| collection | DSpace DC |
| description | The factors accompanied the generation directed super-radiation in high-current pulse discharge in tin vapor are investigated. Basing on measurements of space distribution of radiation intensity and fixing of discharge evolution phases images it was shown that generation of directed super-radiation occurs in the moment of plasma jet gushes from dense plasma formations situated close to the anode, and the orientation of super-radiation is the same as the plasma jet one. It was drown a conclusion about the presence of radiation-stimulated radiation effect in multiply ionized plasma.
|
| first_indexed | 2025-12-07T19:00:45Z |
| format | Article |
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176 PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY. 2010. 6.
Series: Plasma Physics (16), p. 176-178.
INFLUENCE OF PLASMA NUCLEUS FORM ON RADIATION
ORIENTATION IN HIGH-CURRENT PULSE PLASMA DIODE
A.F. Tseluyko1, V.T. Lazurik1, D.L. Ryabchikov1, A. Hassanein2, V.I. Maslov1, I.V. Borgun1,
I.N. Sereda1
1 V.N. Karazin Kharkov National University, Kharkov, Ukraine;
2Purdue University, West Lafayette, USA
E-mail: tselujko@htuni.kharkov.ua
The factors accompanied the generation directed super-radiation in high-current pulse discharge in tin vapor are
investigated. Basing on measurements of space distribution of radiation intensity and fixing of discharge evolution
phases images it was shown that generation of directed super-radiation occurs in the moment of plasma jet gushes from
dense plasma formations situated close to the anode, and the orientation of super-radiation is the same as the plasma jet
one. It was drown a conclusion about the presence of radiation-stimulated radiation effect in multiply ionized plasma.
PACS: 52.75.-d; 52.59Mv
1. INTRODUCTION
The paper is concerned with creation of intensive
radiation plasma source with the wave length = 13.5 nm
for nanolithography. The radiation is formed due to
recombination of multiply ionized tin atoms. The plasma
creation and heating were performed in pulse plasma
diode. It was shown in paper [1] that in such discharges at
anode current density over 100 kA/cm2 in dense plasma
formations situated close to the anode the generation of
powerful peaks of super-radiation in the range of wave
lengths 12.2…15.8 nm and 50…200 ns in duration are
occur. The peak radiation was observed in inductive
phase of discharge evolution and took place in the first
four half-cycles of discharge current. In [2] it was
established that such radiation has strong orientation,
which is different for different half-cycles of discharge
current. The aim of present paper is to establish the
connection of radiation orientation with the form of dense
plasma formations in high-current pulse plasma diode in
tin vapor.
2. EXPERIMENTAL SETUP
For studying of plasma column evolution dynamic the
rapid system of image registration based on electron
optical transformer (EOT) was used. The investigations
were carried out by the way of single photographing of
discharge gap in a fixed time moment using digital photo
camera. The EOT was used as rapid light shutter due to
pulse enabling voltage feeding VF 20 ns in duration from
illumination generator.
Simultaneously with fixing plasma column image the
discharge current and voltage as well as intensity of
radiation in the wave lengths 12.2…15.8 nm along and
crosswise of the discharge were registered. The intensity
measurement in this wave length was performed by
semiconductor detector AXUV-20 with Mo–Si light
filters. The discharge gap and systems of radiation
intensity measurement were set in vacuum chamber,
which pumped up to 10–6 Torr. The experimental setup is
shown on Fig. 1.
The discharge gap includes a cathode with three
ignitor rods, a needle anode and a coaxial current
conduction system. For radiation withdrawal along
discharge the cathode has a tube configuration. The outer
cathode diameter was 1.1 cm, the inner one was 0.7 cm.
Fig. 1. The scheme of experiment. – anode, - cathode
of discharge, SD⊥ and SD|| – the systems of radiation
measurement in the wave lengths 12.2 - 15.8 nm along
and crosswise of the discharge accordingly, SFR – the
system of image registration
The diameter of needle anode A was varied from 0.15 to
0.5 cm. For anode current concentration on the butt-end
the anode side was covered by tube ceramic insulator. The
sides and butt-ends of cathode and anode were covered
with pure tin layer. The distance between cathode and
anode was 5 cm.
The cathode and anode were attached immediately to
capacitor with capacity of 2 µF, which charged up to
voltages of 4…15 kV. At low pressure the discharge were
ignited after discharge gap filling by initial plasma due to
surface disruption on the cathode at pulse ignition voltage
Vign= 0.5…5.0 kV supplying.
At radiation intensity measurement by semiconductor
detectors AXUV-20 the optical channel was protected
IAXUV ||
IAXUV⊥
SD||
SD⊥
VF
Id
C0
Vd
Vign
CA
+V0d
EOT
SIR
mailto:tselujko@htuni.kharkov.ua
177
from high-energy charge particle influence by built
transverse magnetic field with intensity of 2 kOe with
25 cm in extent. The detectors were equidistant on
distance of 42 cm from discharge zone. The detecting
aperture of transverse detector grasped the whole zone of
radiation generation.
3. RESULTS AND DISCUSSION
The maximum longitudinal orientation of peak super-
radiation was observed at anode 0.15 cm in diameter
using [2]. The oscillograms of discharge voltage and
current, intensities of radiation along and crosswise the
discharge are shown in Fig. 2. Here are presented the
snapshots of the area situated close to the anode as well.
The snapshots were made immediately before the peak of
radiation, in the moment of radiation and 0.3 µs after it.
Fig. 2. The oscillograms of voltage (a) and current (b) of
the discharge, intensities of radiation crosswise (c) and
along (d) the discharge at V0d= 14 kV, da=0.15 cm.
(The light pulses of EOT 1-3 on oscillogram (d) are
correspondent the snapshots of the area situated close to
the anode 1-3)
One can see, that powerful peak super-radiation of
strong longitudinal direction (I||/I⊥~20) is observed in the
1st half-cycle of discharge current. Before the radiation
peak the dense plasma situated close to anode has half-
spheric form (snapshot 1). In the moment of peak
radiation from the plasma toward the cathode the thin
plasma jet ~0,05 cm in diameter and ~0.12 cm in length
gushes (snapshot 2). After radiation peak this jet
expanded up to diameter of ~0.3 cm.
For studying the forming conditions of the peak super-
radiation in 2nd half-cycle the conditions of experiment were
changed. According to paper [2] the peak radiation here is
observed at discharge voltage 6…9 kV and at increased anode
diameter. In this case after the main radiation peak in current
maximum in 200 ns peak-satellite follows.
The oscillograms of discharge voltage and current,
intensities of radiation in longitudinal and transverse
direction and 5 snapshots of different discharge phases are
shown in Fig. 3 as well. The 1st one is made before the
beginning of main radiation peak, 2nd one is made in the
moment of main radiation peak, 3rd one is made between
the main peak and peak-satellite, 4th one is made in the
moment of peak-satellite radiation, 5th one is made after
peak-satellite radiation.
Fig. 3. The oscillograms of voltage (a) and current (b) of
the discharge, intensities of radiation crosswise (c) and
along (d) the discharge at V0d= 8 kV, da=0.25 cm.
(The light pulses of EOT 1-5 on oscillogram (d) are
correspondent the snapshots of the area situated close to
the anode 1-5)
One can see from the oscillograms of radiation
intensities, that radiation of main peak has transverse
direction and peak-satellite radiation has longitudinal
direction. According snapshots 1 and 2 the super-radiation
of main peak is generated in plasma nucleus of elliptic
form. The snapshot 4 shows, that radiation of peak-
satellite is accompanied with elongate plasma jet
appearing. At this the intensities of peak-satellite radiation
along the discharge exceeds crosswise one in 6 times.
For clearness the general discharge snapshot is shown
in Fig. 4, where the whole radiation zones are visible: 1 –
plasma situated close to anode, where recombination
radiation generates; 2 – plasma jet, which generates peak
super-radiation of longitudinal direction in the 1st half-
cycle of discharge current; 3 – ellipsoid with generation
1
9.0µ 10.0µ 11.0µ 12.0µ 13.0µ
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9.0µ 10.0µ 11.0µ 12.0µ 13.0µ
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178
of peak radiation of transverse direction in 2nd half-cycle;
4 – plasma jet, where the longitudinal radiation of peak-
satellite generates.
Fig. 4. The general snapshot of discharge gap with
radiation generation zones
On the basis of presented data one can assume that
super-radiation occurs at condition when magnetic shell
stops keeping the hot dense plasma. Herewith the fast
plasma expansion and drastical cooling-down happens.
The dropping of electron temperature leads to decrease
of recombination flow neck depth (~3/2⋅ ) [3] and
promotes the fast ion recombination.
Orientation of radiation apparently concerns with
existence of mechanism of photon flow amplification in
multiply ionized plasma (radiation-stimulated radiation
effect). Then plasma elongation in some direction leads to
strong increase of radiation intensity in this direction.
(Estimation of photon path length with energy of 92 eV in
plasma for our case gets the value of several millimeters
that comparable with characteristic dimensions of dense
plasma formations).
At availability of mechanism amplification of photon
flow at flattened in longitudinal direction elliptical
formations it will be generated the super-radiation of not
high transversal orientation. In the elongated plasma jets
it will be generated the radiation with strong longitudinal
orientation.
4. CONCLUSIONS
In result of experiments it has been established, that
orientation of super-radiation depends on elongation of
plasma formation in this direction. The super-radiation
appearing concerns with long plasma jet gush from
plasma formation. The appearing of super-radiation is
apparently associated with drastical plasma cooling down
in the moment of plasma formation expansion. The
correspondence of radiation orientation with form of
plasma formation allows talking about existence of
radiation-stimulated radiation effect in multiply ionized
plasma.
REFERENCES
1. A.F. Tseluyko, V.T. Lazurik, D.L. Ryabchikov,
V.I. Maslov, I.N. Sereda. Experimental study of
radiation in the wavelength range 12.2-15.8 nm from a
pulsed high-current plasma diode // Plasma physics
report. 2008, v.34, N11, p. 1041-1046 (in Russian).
2. A.F. Tseluyko, V.T. Lazuryk, D.V. Ryabchikov, et al.
The Dynamics and Directions of Extreme Ultraviolet
Radiation from Plasma of the High-Current Pulse
Diode // Problems of Atomic Science and Technology.
Series “Plasma Physics” (15). 2009, v.1, p.165-167.
3. Ye.L. Latush. Work principle and applying perspective
of recombination plasma lasers // Soros educational
journal. 1999, N 8, p.83-89 (in Russian).
Article received 13.10.10
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| id | nasplib_isofts_kiev_ua-123456789-17496 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1562-6016 |
| language | English |
| last_indexed | 2025-12-07T19:00:45Z |
| publishDate | 2010 |
| publisher | Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| record_format | dspace |
| spelling | Tseluyko, A.F. Lazurik, V.T. Ryabchikov, D.L. Hassanein, A. Maslov, V.I. Borgun, I.V. Sereda, I.N. 2011-02-26T22:57:49Z 2011-02-26T22:57:49Z 2010 Influence of plasma nucleus form on radiation orientation in high-current pulse plasma diode / A.F. Tseluyko, V.T. Lazurik, D.L. Ryabchikov, A. Hassanein, V.I. Maslov, I.V. Borgun, I.N. Sereda // Вопросы атомной науки и техники. — 2010. — № 6. — С. 176-178. — Бібліогр.: 3 назв. — англ. 1562-6016 https://nasplib.isofts.kiev.ua/handle/123456789/17496 The factors accompanied the generation directed super-radiation in high-current pulse discharge in tin vapor are investigated. Basing on measurements of space distribution of radiation intensity and fixing of discharge evolution phases images it was shown that generation of directed super-radiation occurs in the moment of plasma jet gushes from dense plasma formations situated close to the anode, and the orientation of super-radiation is the same as the plasma jet one. It was drown a conclusion about the presence of radiation-stimulated radiation effect in multiply ionized plasma. en Національний науковий центр «Харківський фізико-технічний інститут» НАН України Низкотемпературная плазма и плазменные технологии Influence of plasma nucleus form on radiation orientation in high-current pulse plasma diode Влияние формы плазменного ядра на направленность излучения в сильноточном импульсном плазменном диоде Article published earlier |
| spellingShingle | Influence of plasma nucleus form on radiation orientation in high-current pulse plasma diode Tseluyko, A.F. Lazurik, V.T. Ryabchikov, D.L. Hassanein, A. Maslov, V.I. Borgun, I.V. Sereda, I.N. Низкотемпературная плазма и плазменные технологии |
| title | Influence of plasma nucleus form on radiation orientation in high-current pulse plasma diode |
| title_alt | Влияние формы плазменного ядра на направленность излучения в сильноточном импульсном плазменном диоде |
| title_full | Influence of plasma nucleus form on radiation orientation in high-current pulse plasma diode |
| title_fullStr | Influence of plasma nucleus form on radiation orientation in high-current pulse plasma diode |
| title_full_unstemmed | Influence of plasma nucleus form on radiation orientation in high-current pulse plasma diode |
| title_short | Influence of plasma nucleus form on radiation orientation in high-current pulse plasma diode |
| title_sort | influence of plasma nucleus form on radiation orientation in high-current pulse plasma diode |
| topic | Низкотемпературная плазма и плазменные технологии |
| topic_facet | Низкотемпературная плазма и плазменные технологии |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/17496 |
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