The effect of unintentional oxygen incorporation into Cr-CrN-DLC coatings deposited by MePIIID method using filtered cathodic vacuum arc carbon and metal plasma

• Date: 2010
• Main Authors: Walkowicz, J., Bujak, J., Zavaleyev, V.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2010
• Subjects: Низкотемпературная плазма и плазменные технологии
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/17497
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: The effect of unintentional oxygen incorporation into Cr-CrN-DLC coatings deposited by MePIIID method using filtered cathodic vacuum arc carbon and metal plasma / J. Walkowicz, J. Bujak, V. Zavaleyev // Вопросы атомной науки и техники. — 2010. — № 6. — С. 179-181. — Бібліогр.: 3 назв. — англ.

The multilayer Cr-CrN-DLC coatings deposited by MePIIID method on substrates made of high speed steel HS 6-5-2 were studied. The streams of filtered carbon and metal arc plasma were used in both ion implantation and deposition phases. Investigation of the chemical composition of Cr-CrN-DLC coatings...