The effect of unintentional oxygen incorporation into Cr-CrN-DLC coatings deposited by MePIIID method using filtered cathodic vacuum arc carbon and metal plasma
The multilayer Cr-CrN-DLC coatings deposited by MePIIID method on substrates made of high speed steel HS 6-5-2 were studied. The streams of filtered carbon and metal arc plasma were used in both ion implantation and deposition phases. Investigation of the chemical composition of Cr-CrN-DLC coatings...
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| Date: | 2010 |
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| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2010
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/17497 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | The effect of unintentional oxygen incorporation into Cr-CrN-DLC coatings deposited by MePIIID method using filtered cathodic vacuum arc carbon and metal plasma / J. Walkowicz, J. Bujak, V. Zavaleyev // Вопросы атомной науки и техники. — 2010. — № 6. — С. 179-181. — Бібліогр.: 3 назв. — англ. |
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