Influence of the magnitude of the bias potential and thickness of the layers on the structure, substructure, stress-deformed state and mechanical characteristics of vacuum-arc multi-layered (TiMo)N/(TiSi)N coatings

• Veröffentlicht in: Вопросы атомной науки и техники
• Datum: 2020
• Hauptverfasser: Sobol, O.V., Postelnyk, H.O., Meylekhov, A.A., Subbotina, V.V., Stolbovoy, V.A., Dolomanov, A.V., Kolesnikov, D.A., Kovaleva, M.G., Sukhorukova, Yu.V.
• Format: Artikel
• Sprache: English
• Veröffentlicht: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2020
• Schlagworte: Physics of radiation and ion-plasma technologies
• Online Zugang: https://nasplib.isofts.kiev.ua/handle/123456789/194419
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Zitieren: Influence of the magnitude of the bias potential and thickness of the layers on the structure, substructure, stress-deformed state and mechanical characteristics of vacuum-arc multi-layered (TiMo)N/(TiSi)N coatings / O.V. Sobol, H.O. Postelnyk, A.A. Meylekhov, V.V. Subbotina, V.A. Stolbovoy, A.V. Dolomanov, D.A. Kolesnikov, M.G. Kovaleva, Yu.V. Sukhorukova // Problems of atomic science and tecnology. — 2020. — № 4. — С. 68-76. — Бібліогр.: 34 назв. — англ.

Layers based on titanium nitride doped with molybdenum and silicon were used to create a multilayer composite. In this case, the mismatch between the lattice periods of (TiMo)N and (TiSi)N layers was about 1%. It was found that in the (TiMo)N/(TiSi)N multilayer composite, such a mismatch of the peri...