APA (7th ed.) Citation

Bizyukov, A., Tarasov, I., & Chibisov, A. (2019). Using of electron cyclotron resonance discharge in ion beam sputtering systems for space charge compensation. Вопросы атомной науки и техники.

Chicago Style (17th ed.) Citation

Bizyukov, A.A, I.K Tarasov, and A.D Chibisov. "Using of Electron Cyclotron Resonance Discharge in Ion Beam Sputtering Systems for Space Charge Compensation." Вопросы атомной науки и техники 2019.

MLA (8th ed.) Citation

Bizyukov, A.A, et al. "Using of Electron Cyclotron Resonance Discharge in Ion Beam Sputtering Systems for Space Charge Compensation." Вопросы атомной науки и техники, 2019.

Warning: These citations may not always be 100% accurate.