Using of electron cyclotron resonance discharge in ion beam sputtering systems for space charge compensation

• Published in: Вопросы атомной науки и техники
• Date: 2019
• Main Authors: Bizyukov, A.A., Tarasov, I.K., Chibisov, A.D.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2019
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/194631
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Using of electron cyclotron resonance discharge in ion beam sputtering systems for space charge compensation / A.A. Bizyukov, I.K. Tarasov, A.D. Chibisov // Problems of atomic science and technology. — 2019. — № 1. — С. 124-126. — Бібліогр.: 4 назв. — англ.

The possibility of using a magnetic mirror in the output gap of ion source with a closed electron drift to generating of an additional gas discharge by using the electron-cyclotron resonance to compensate of the ion beam space charge is studied. The first experiments have shown that an additional mi...