Hardware-software complex for automated control and monitoring of the vacuum system of the coating setup "Bulat-6"

• Published in: Вопросы атомной науки и техники
• Date: 2019
• Main Authors: Gubarev, S.P., Leonovych, A.V., Muratov, R.M., Nezovibat'ko, Y.N., Opaleva, G.P., Taran, V.S., Zolototrubova, M.I.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2019
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/194634
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Hardware-software complex for automated control and monitoring of the vacuum system of the coating setup "Bulat-6" / S.P. Gubarev, A.V. Leonovych, R.M. Muratov, Y.N. Nezovibat'ko, G.P. Opaleva, V.S. Taran, M.I. Zolototrubova // Problems of atomic science and technology. — 2019. — № 1. — С. 135-137. — Бібліогр.: 5 назв. — англ.

The hardware-software complex for automated control and monitoring of the vacuum system of the coating setup "Bulat-6" is presented. Its use provides the stability of the process of obtaining and maintaining the required vacuum in the plant. The complex is built on the basis of the softwar...