Study of low-pressure discharge by optical emission spectroscopy
The axial distribution of excited argon and tungsten atoms in plasma of direct current magnetron discharge in crossed fields have been analyzed by optical emission spectroscopy. The influence of discharge parameters (discharge current I, buffer gas pressure pAr and zone of discharge glow Δl) and exc...
Gespeichert in:
| Veröffentlicht in: | Вопросы атомной науки и техники |
|---|---|
| Datum: | 2020 |
| Hauptverfasser: | , , , , , , , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2020
|
| Schlagworte: | |
| Online Zugang: | https://nasplib.isofts.kiev.ua/handle/123456789/194652 |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Study of low-pressure discharge by optical emission spectroscopy / I.A. Afanasіeva, S.N. Afanasiev, V.V. Bobkov, V.V. Gritsyna, I.S. Mahotka, I.I. Okseniuk, D.I. Shevchenko, A.O. Skrypnyk // Problems of atomic science and tecnology. — 2020. — № 6. — С. 98-102. — Бібліогр.: 20 назв. — англ. |
Institution
Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1859995949448822784 |
|---|---|
| author | Afanasіeva, I.A. Afanasiev, S.N. Bobkov, V.V. Gritsyna, V.V. Mahotka, I.S. Okseniuk, I.I. Shevchenko, D.I. Skrypnyk, A.O. |
| author_facet | Afanasіeva, I.A. Afanasiev, S.N. Bobkov, V.V. Gritsyna, V.V. Mahotka, I.S. Okseniuk, I.I. Shevchenko, D.I. Skrypnyk, A.O. |
| citation_txt | Study of low-pressure discharge by optical emission spectroscopy / I.A. Afanasіeva, S.N. Afanasiev, V.V. Bobkov, V.V. Gritsyna, I.S. Mahotka, I.I. Okseniuk, D.I. Shevchenko, A.O. Skrypnyk // Problems of atomic science and tecnology. — 2020. — № 6. — С. 98-102. — Бібліогр.: 20 назв. — англ. |
| collection | DSpace DC |
| container_title | Вопросы атомной науки и техники |
| description | The axial distribution of excited argon and tungsten atoms in plasma of direct current magnetron discharge in crossed fields have been analyzed by optical emission spectroscopy. The influence of discharge parameters (discharge current I, buffer gas pressure pAr and zone of discharge glow Δl) and excited states energy E* of studied particles on the axial distribution Ar and W atoms have been observed. The assumption about the excitation processes in the magnetron plasma is given.
Методом оптичної емісійної спектроскопії проаналізовано аксіальний розподіл збуджених атомів аргону і вольфраму в плазмі постійного магнетронного розряду в схрещених E×H-полях. Виявлено вплив параметрів розряду (струм розряду Id, тиск буферного газу pAr і область світіння розряду Δl) та енергії збуджених станів E* досліджуваних частинок на розподіл атомів Ar і W уздовж осі розряду. Зроблено припущення про процеси збудження в магнетронній плазмі.
Методом оптической эмиссионной спектроскопии проанализировано аксиальное распределение возбуж- денных атомов аргона и вольфрама в плазме постоянного магнетронного разряда в скрещенных E×H-полях. Обнаружено влияние параметров разряда (ток разряда Id, давление буферного газа pAr и область свечения разряда Δl) и энергии возбужденных состояний E* исследуемых частиц на распределение атомов Ar и W вдоль оси разряда. Сделано предположение о процессах возбуждения в магнетронной плазме.
|
| first_indexed | 2025-12-07T16:34:27Z |
| format | Article |
| fulltext |
ISSN 1562-6016. ВАНТ. 2020. №6(130)
98 PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY. 2020, № 6. Series: Plasma Physics (26), p. 98-102.
https://doi.org/10.46813/2020-130-098
STUDY OF LOW-PRESSURE DISCHARGE BY OPTICAL EMISSION
SPECTROSCOPY
I.A. Afanasіeva
1
, S.N. Afanasiev
2
, V.V. Bobkov
1
, V.V. Gritsyna
1
, I.S. Mahotka
1
,
I.I. Okseniuk
1
, D.I. Shevchenko
1
, A.A. Skrypnyk
1
1
V.N. Karazin Kharkiv National University, Kharkiv, Ukraine;
2
National Science Center “Kharkov Institute of Physics and Technology”, Kharkiv, Ukraine
E-mail: bobkov@karazin.ua
The axial distribution of excited argon and tungsten atoms in plasma of direct current magnetron discharge in
crossed fields have been analyzed by optical emission spectroscopy. The influence of discharge parameters (dis-
charge current Id, buffer gas pressure pAr and zone of discharge glow ∆l) and excited states energy E* of studied
particles on the axial distribution Ar and W atoms have been observed. The assumption about the excitation pro-
cesses in the magnetron plasma is given.
PACS: 32.30.−r, 34.35.+a, 34.50.−s, 34.50.Dy, 34.80.Dp, 52.70.Kz, 52.80.Vp
INTRODUCTION
The magnetron sputtering devices (MSD) are widely
used in the microelectronics industry for plasma etching
and deposition of thin film with unique physical and
chemical characteristics [1-3]. Due to the importance to
create high quality of thin films it is necessary to carry
out systematic experimental investigations of the fun-
damental plasma parameters for the kinetics of the par-
ticles formation understand [4]. The most common
plasma parameters diagnostic methods are Langmuir
probe [5] and Optical Emission Spectroscopy (OES) [6,
7]. The use of the Langmuir probe method is complicat-
ed due to a possible plasma perturbation. OES is non-
invasive. In addition, the experimental set-up is very
simple: only diagnostic ports are necessary which pro-
vide a line-of-sight through the plasma. Although the
optical emission spectra of plasma can be easily ob-
tained, interpretation can be complex as should be done
careful analysis of kinetic processes that contribute to
populating and depopulating excited states of the spe-
cies in the plasma. The optical emission spectra of
plasma provide the information on the chemical compo-
sition of plasma particles and the population of its excit-
ed states by electron impact processes. The spatial dis-
tribution of the excited particles can provide infor-
mation about the kinetics of particle formation to deter-
mine such fundamental plasma parameters as the elec-
tron density and the electron temperature. The optical
radiation from plasma usually is studied using OES
measurements performed through a window with an
optical fiber. For spatial measurements an optical fiber
is pointed to the plasma bulk perpendicularly to the
window [2, 8] and is moved along the discharge axis as
well as MSD is moved along the discharge axis [9].
In the present study the emission spectra of glow of
planar magnetron discharge in crossed field in the visi-
ble spectral range have been obtained. The analysis of
plasma optical radiation was carried out using software
developed by our research group. The influence of the
main discharge parameters (gas density, discharge cur-
rent and the glow plasma domain) and the energy of the
excited state of particles on the axial distribution the
spectral line intensity have been studied. A discussion
on the main kinetic processes by electron excitation in
the magnetized plasma is given.
EXPERIMENTAL SET-UP
The experimental set-up consists of a MSD with op-
tical arrangement for OES measurements (Fig. 1). A
detailed description of the MSD is given in [10]. Typi-
cal experimental conditions of magnetron discharge
(MD) for a tungsten target are as follows: buffer gas
(Ar) pressure pAr = 8...15 Pa, discharge voltage
Va = 350 V, discharge currents Id = 10...160 mA, mag-
netic induction B = 0.05 T. The choice of cathode mate-
rial is due to the fact that tungsten has a low sputtering
coefficient, a high melting point and rich atomic spec-
trum in visible spectral region.
MSD
achromatic
lens L
Canon
EOS 80D
ISP-51
РС
l0
discharge
glow volume
target
+
l0
vacuum
chamber
water
cooling
Wi-Fi
focal
plane
magnetic
field
l l0
DW
A
Fig. 1. Experimental set-up
The MD region can be conventionally divided into
three main parts [4, 11]: the cathode sheath, the dense
plasma magnetized region (bright glow space, ~ 10 mm)
and then the space down to the anode that the MSD
camera serves. The optical radiation from the bright
glow region exit through the diagnostic window (DW)
of the MSD camera, and then is focused using an
achromatic lens (L) on the entrance slit of the ISP-51
spectrometer, in which the radiation is dispersed using
three-prism system. After dispersion, the spectrum in
the wavelength range of 390...650 nm is focused on the
focal plane of the spectrometer output collimator. Inset
A in Fig.1 shows the MD glow and the direction l of
mailto:bobkov@karazin.ua
ISSN 1562-6016. ВАНТ. 2020. №6(130) 99
extent of the discharge glow parallel to the discharge
axis l0. With working geometry the optical radiation of
the MD glow extent ∆l distributed along of the spectrum
lines high (∆h) with decrease 0.25 (∆h=0.25∆l). That
image of spectrum was photographed using a Canon
EOS 80D digital camera with a matrix size of
7000/5000 pixels. The photons of MD radiation incident
on the sensor of the charge-coupled device (CCD) and
converted into the electronic signal. After digitization
the output signal (D) transferred to a computer for dis-
play image and storage.
To display the measured emission spectra and de-
termine the qualitative and quantitative characteristics
of MD plasma, a multifunctional interactive GUI appli-
cation OSA (Optical Spectrum Analyzed) is used [12,
13]. The OSA application was created in the Python
programming language, using the Tkinter graphics li-
brary, and uses a set of additional modules: PIL, SciPY,
NumPy, and Matplotlib. Mathematical algorithms and
procedures have been developed that allow to pro-
cessing the numerical matrix corresponding to the se-
lected digital image and visualize the results. For con-
version the digitization signal (D) into photonic signal
(I) the response function (RF) was obtained with using
nine-stage attenuator.
EXPERIMENTAL RESULTS AND
DISCUSSION
The spectra of the MD radiation were recorded in a
wide wavelength range of 400...650 nm and cover all
experimental conditions explored in the study (pAr = 8,
11, and 15 Pa; Id = 10, 20, 30, 40, 50, 60, 70, 100, 120,
140 and 160 mA). Spectra in the wavelength
400...650 nm mainly composed of tungsten atom lines
that belong to the transition from states with electron
configuration 5d
4
6s6p to grand state with electron con-
figuration 5d
4
6s
2
. The spectra also contained weak lines
of argon atoms (the transition from the states with elec-
tron configuration 3s
2
3p
5
5p and 3s
2
3p
5
5d to states with
electron configuration 3s
2
3p
5
4s and 3s
2
3p
5
4p) and weak
lines from singly ionized Ar
+
ions. As was pointed out
in [14] the pronounced argon lines are observed in the
red region (690...900 nm). The emission spectrum of the
MD glow in the wavelength range of 400.0...650 nm is
given in Fig. 2. Discharge external parameters:
Id = 70 mA, Ud = 350 V, pAr = 10 Pa. In the emission
spectrum are predominantly present W I lines and a
series of Ar I and Ar II lines. There is a significant dif-
ference in the intensity (the digitization signal D) distri-
bution of spectral lines emitted by excited W and Ar
particles along their height (h).
The spectral line intensity (I) depends on the popula-
tion density of the excited level (n*) as:
I = n*·A· (h·c/λ), (1)
where A is the Einstein transition probability, h – Planck
constant, c – speed of light and λ – wavelength of line.
Therefore a change in the line intensity (I) along its
height (h) reflects change in the population density of
excited particles (n*) along direction (l). In order to
study the spatial distribution of excited particles along
the discharge axis, some lines were selected, the param-
eters of which are given in the Table. The choice of
lines was determined by the following: the excitation
energies of the observed tungsten lines are in the range
from 2.48 to 3.24 eV, therefore three lines with the
lowest, highest, and intermediate excitation energy were
chosen for analysis. Since the Ar lines observed in the
spectrum has the excitation energy of 15 eV, for the
study the line with high intensity was chosen for the
study.
Measurements of I(h) of the selected lines were per-
formed for various parameters (pAr, Id) of the MD. The
results are shown in Figs. 3, 4.
Fig. 2. The emission spectrum of the magnetron discharge glow
The general behavior is as follows: as h increases the
I rises sharply to a peak and then slowly falls. However,
the shape of I(h) is determined by the discharge parame-
ters (Id, pAr) as well as excitation energy (E*) of the
emitting particle. The intensity of line is directly propor-
tional to the number of excited particles emitting this
line therefore I(h) displays the distribution of excited
particles along the discharge glow extent (∆l). For the
λλ 468.1 nm W I, 518.8 nm Ar I lines emitted by the
atoms excited in states with high excitation energy E*
I(h), a pronounced peak is determined, and then a sharp
decrease. That means, that the highly excited particles
are formed in the nearest to cathode part of glow. At the
same time, for the λλ 543.5 nm, 522.5 nm W I lines
emitted by the atoms excited in the states with low exci-
tation energy E* I(h) changes insignificantly. Therefore,
particles excited to levels with low E* are formed in the
entire registration region of glow with almost identical
probabilities. Such a difference in I(h) for the lines with
Е*<3 eV and Е*>3 eV is probably due to the presence
of two group of electrons in MD plasma [17]. i) The
energetic electrons which results from the injection of
electrons accelerated in the cathode sheath with subse-
quent energy degradation in the glow. These energetic
100 ISSN 1562-6016. ВАНТ. 2020. №6(130)
electrons can allow the direct formation of excited at-
oms in states with high excitation energy. ii) The ther-
mal electrons which are located in the magnetized zone
of the discharge. These electrons are formed atoms in
the states with low excitation energy.
The parameters of the spectral lines studied in the work
Wavelength, nm
λexp, / λair [16]
Interpretation
Excitation
energy
Е*, eV [15]
Spectral transition [16]
Upper state
Configuration State
Lower state
Configuration State
543.5 / 543.5032 W I 2.48 5d
4
6s(
6
D)6p
7
F1
0
5d
4
6s
2
5
D1
522.5 / 522.4675 W I 2.97 5d
4
6s(
6
D)6p
7
D
º
2 5d
4
6s
2
5
D3
468.1 / 468.0509 W I 3.24 5d
4
6s(
6
D)6p
7
D
º
3 5d
4
6s
2
5
D3
518.8 / 518.7746 Ar I 15.30 3s
2
3p
5
(
2
P
o
1/2)5d
2
[1 ½]º2 3s
2
3p
5
(
2
P
0
3/2)4p
2
[½]1
Fig. 3. Variation of intensity (I) of denoted lines on it
height (h). I – pAr =15 Pа, II – pAr =8 Pа;
Id = 60 mА (■), 70 mА (●), 100 mА (▲), 120 mА (▼),
140 mА (►), 160 mА (◄)
Fig. 4. Variation of intensity (I) of denoted lines on it
height (h). I – pAr =15 Pа, II – pAr =8 Pа;
Id = 60 mА (■), 70 mА (●), 100 mА (▲), 120 mА (▼),
140 mА (►), 160 mА (◄)
In order to study the influence of the discharge parame-
ters (discharge current, zone of the extent of MD glow
and gas pressure) on the excited particles formation, the
intensities of the selected lines (Iλ) against the discharge
current (Id) at the Ar pressures pAr = 11 Pa and two
zones of discharge present in Fig. 5. Logarithmic scale
have been chosen to interpret the results as Iλ = k·Id
α
.
At the bright glow region of MD (see max I(h),
Figs. 3, 4) the alike behavior of the intensity of all the
denoted lines on the discharge current was observed: as
Id increases the Iλ rises too up to saturation at high cur-
rents. The saturation at low currents was observed too,
but it was conditioned by the background noise of the
digital signal at weak lines intensity. The insignificant
increase in the line intensity with pAr = 15 Pa was ob-
served. Although the intensity of selected lines behaves
like Iλ = k·Id
α
, the slopes in log-log plot are very differ-
ent: α=1.4 for λ543.5 nm W I, α=1.6 for λ522.5 nm W I
and α~1 for lines λ486.1 nm W I and λ518.8 nm Ar I.
As it was pointed out earlier (1), the line intensity
correlates with the population of the excited level of
studying transition. From the experimental data it fol-
lows that the excited states population of plasma species
strongly depends on the discharge current and different
processes are determine the population of studied levels.
The excitation energy of the tungsten atoms studied in
the work is in the range 2.5…3.5 eV. The argon atoms
excitation energy of all excited states is above 11 eV
[18]. So the direct electron impact excitation processes
are the most important ones for W. Therefore, the direct
electron impact excitation processes are more signifi-
cant for W than for Ar.
A simple approach to the population density in elec-
tron-atom collisions is presented by the corona model
[6], where it is assumed that the upward transition oc-
curs only due to electron collisions, while the downward
transitions only due to radiative decay. In the simplest
case, the population of an excited state (ni) is balanced
by electron impact excitation from the ground state (n0)
and decays by spontaneous emission (optically allowed
transitions to lower level (k)):
n0·ne·X0i
exc
= ni·ΣAik, (2)
where X0i
exc
is excitation rate coefficient which can be
obtained from the convolution of the cross section with
the corresponding energy distribution function (EEDF)
of the impact particle; ne is the electron density. As
following from (1) the spectral line intensity (Iik) can be
written as:
ISSN 1562-6016. ВАНТ. 2020. №6(130) 101
Iik = (Aik/ΣAik)·n0·ne·X0i
exc
. (3)
In MD the density of sputtered metal atoms is pro-
portional to the discharge current and the Ar
+
-W sput-
tering coefficient (Y); the electron density is proportion-
al to the discharge current and the W coefficient of ion-
electron emission (γ). So (3) can be written as:
Iik = Kik·(Id)
2
, (4)
where Kik = Yγ·(Aik/ΣAik). Therefore, it can be concluded
that the increasing part of I(Id)
α
of lines W I in Fig. 5
reflects the change in the population of particles excited
in identified state on Id. As it is seen α is not exactly
equal to 2 as X0i
exc
is depends on such plasma parame-
ters as ne, n0 etc. [6].
Fig. 5. Variation of the Ar I and W I lines intensity (I)
on discharge current (Id) in lg-lg plot. ■ – the peak of
I(h); ○ – at h =1.5 mm from the peak I(h); pAr = 11 Pа.
The dotted line denotes I Id
2
So only two processes are important: the electron-
impact excitation process from the ground state W at-
oms and spontaneous radiation from the excited atoms.
Thus the population of W atoms in excited states can be
described by corona model which is valid for excited
plasma species in low-temperature plasma with low
pressure (<10 Pa) [7]. A more general approach to
population is to set up rate equations for each state of
the particles together with the coupling to other parti-
cles. Such model, which balances the collisional and
radiative processes, is called the collisional radiative
model (CRM) [6]. So, the saturation Iλ depending on Id
at high Id (Fig. 5, W I) can be associated with non-
radiative electron or tungsten atom impacts with excited
tungsten atoms when the n0 of tungsten atoms rises with
growth of Id.
Dependence the Ar I line intensity on discharge cur-
rent as Iλ = k·Id
α
cannot be described by corona model
because in Ar plasma at pAr ≈ 10 Pa the tail (E>10 eV)
of the low-energy part of the EEDF is decreased as
compared with Maxwellian distribution [19]. The for-
mation of Ar atoms in the 5d state with the excitation
energy of 15.34 eV [18] in the direct electron-Ar atom
in ground state impact is unlikely. But the Ar atom has
two metastable states with the excitation energies
11.548 and 11.723 eV [18], therefore, it is most likely
that the excited in 5d state Ar atom is formed in two-
step processes: e+Ar(0)→Ar(m) (1); e+Ar (m)→Ar (5d)
(2). In zone of the extent of MD glow at h=1.5 mm
(see I(h), Figs. 3, 4) the dependence of the intensity of
all the denoted lines on the discharge current signifi-
cantly changes, as a result of change in density distribu-
tion of electrons in that zone [20] which affects the
behavior of Iλ(Id).
CONCLUSIONS
In the work represented the experimental set-up is
made of MSD with an optical arrangement for OES
measurements. The significant feature of the optical
arrangement is the relationship between the change in
the spectral line intensity along its height and the
change in the excited particles population in the glow
part of MD along the axial direction. The optical radia-
tion from the bright glow region was analyzed by a
multifunctional interactive GUI application Optical
Spectrum Analyzed at different discharge parameters.
From the obtained data it follows that the spatial distri-
bution of excited particles varies along the axis and
strongly depends on the MD parameters and the type of
discharge species. A change in the line intensities in
correlation with the discharge current indicates that
particles of the cathode material (W) and the buffer gas
(Ar) get excited in different collision processes. Excita-
tion of W atoms occurs in the direct electron-impact
process and can be described by corona model. An ex-
cited Ar atom in 5d state with a high excitation energy
due to the presence of two metastable states is formed in
two-step processes within the collisional radiative model.
REFERENCES
1. V. Donnelly, A. Kernblit. Plasma etching: Yesterday,
today, and tomorrow // Journal of Vacuum Science and
Technology A. 2012, v. 31, p. 050825.
2. F.J. Gordillo-Vazquez, M. Camero, C. Gomez-
Aleixandre. Spectroscopic measurements of the electron
temperature in low pressure radiofrequency Ar/H2/C2H2
and Ar/H2/CH4 plasmas used for the synthesis of
nanocarbon structures // Plasma Sources Sci. Technol.
2006, v. 15(1), p. 42-51.
3. M. Novoitny, J. Bulir, P. Pokorny, et al. Optical
emission and mass spectroscopy of plasma processes in
reactive DC pulsed magnetron sputtering of aluminium
oxide // Journal of Optoelectronics and Advanced Ma-
terials. 2010, v. 12, p. 697-700.
4. O. Baranov. Teoreticheskaya model razryada magne-
tronnogo raspylitelnogo ustrojstva // Otkritie informa-
zionnie i komp`uternie integrirovannie technologii.
2014, № 64, p. 102-118 (in Russian).
5. D. O`Connell, D.L. Crintea, T. Gans, U. Czarnetzki.
Spatial structures of plasma parameters in a magnetic
neutral loop discharge // Plasma Sources Sci. Technol.
2007, v. 16, p. 543-548.
6. U. Fantz. Basics of plasma spectroscopy // Plasma
Sources Sci Technol. 2006, v. 15, p. S137-S147.
7. X.M. Zhu, Y.K. Pu. Optical emission spectroscopy in
low-temperature plasmas containing argon and nitrogen:
102 ISSN 1562-6016. ВАНТ. 2020. №6(130)
determination of the electron temperature and density
by the line-ratio method // J. Phys. D. Appl. Phys. 2010,
v. 43, p. 403001.
8. L. Gu, A. Liberman. Axial distribution of optical
emission in a planar magnetron discharge // J. Vac. Sci
Technnol. A. 1988, v. 6(5), p. 2960-2964.
9. A.A. El Mel, S. Ershov, N. Britun, et al. Combined
optical emission and resonant absorption diagnostics of
an Ar-O2-Ce-reactive magnetron sputtering discharge //
Spectrochimica Acta Part B. 2015, v. 103-104, p. 99-
105.
10. I.A. Afanasіeva, V.V. Bobkov, V.V. Gritsyna, et al.
On excited particle formation in crossed Е×Н fields //
Vacuum. 2018, v. 149, p. 124-128.
11. F. Guimaraes, J. Almeida, J. Bretagne. Modeling of
the energy deposition mechanisms in an argon magne-
tron planar discharge // Journal of Vacuum Science and
Technology A.1991, v. 9, p. 133-140.
12. I.A. Afanasіeva, S.N. Afanasiev, N.A. Azarenkov,
et al. Digital processing of optical emission spectra
magnetron sputtering plasma system // Problems of
Atomic Science and Technology. Series «Physics of
Radiation Effect and Radiation Materials Science».
2019, № 2(120), p. 164-167.
13. I.A. Afanasieva, S.N. Afanasiev, V.V. Bobkov, et
al. Metod cifrovoj obrabotki spektra svecheniya magne-
tronnogo razryada // Trudi Mezhdunarodnoi Nauchno-
Tehnicheskoi Konferenzii “Komp`yuternoe Modeliro-
vanie v Naukoemkih Tehnologiyah”, Kharkov, 2018,
p. 28-31 (in Russian).
14. S. Iordanova, I. Koleva. Mode operation of induc-
tively-coupled argon plasmas studied by optical emis-
sion spectroscopy // Journal of Physics: Conference
Series. 2007, v. 63, p. 012026.
15. A.N. Zaidel’, V.K. Procof’ev, S.M. Slavnii, et al.
Tables of Spectral Lines. Moscow: «Nauka», 1977,
800 p.
16. National Institute of Standards and Technology,
Gaithersburg, MD. DOI: https://doi.org/10.18434/T4W30F.
17. F. Guimaraes, J.J. Bretagne. Study of an argon mag-
netron discharge used for molybdenum sputtering. I.
Collisional radiative model // Plasma Sources Sci.
Technol. 1993, v. 2, p. 127-137.
18. A. Bogaerts, R. Gijbels, J. Vlcek. Collisional-
radiative model for an argon glow discharge // Journal
of Applied Physics. 1998, v. 84, p. 121-136.
19. D.L. Crintea, U. Czarnetzki, S. Iordanova, et al.
Plasma diagnostics by optical emission spectroscopy on
argon and comparison with Thomson scattering // J.
Phys. D: Appl. Phys. 2009, v. 42, p. 045208 (11 p).
20. A.M. Boraerts, E. Bultinck, I. Kolev, et al. Comput-
er modelling of magnetron discharges // J. Phys. D:
Appl. Phys. 2009, v. 42, p.194018.
Article received 15.10.2020
ИССЛЕДОВАНИЕ РАЗРЯДА НИЗКОГО ДАВЛЕНИЯ МЕТОДОМ ОПТИЧЕСКОЙ
ЭМИССИОННОЙ СПЕКТРОСКОПИИ
И.А. Афанасьева, С.Н. Афанасьев, В.В. Бобков, В.В. Грицына, И.С. Махотка, И.И. Оксенюк,
Д.И. Шевченко, А.А. Скрипник
Методом оптической эмиссионной спектроскопии проанализировано аксиальное распределение возбуж-
денных атомов аргона и вольфрама в плазме постоянного магнетронного разряда в скрещенных E×H-полях.
Обнаружено влияние параметров разряда (ток разряда Id, давление буферного газа pAr и область свечения
разряда ∆l) и энергии возбужденных состояний E* исследуемых частиц на распределение атомов Ar и W
вдоль оси разряда. Сделано предположение о процессах возбуждения в магнетронной плазме.
ДОСЛІДЖЕННЯ РОЗРЯДУ НИЗЬКОГО ТИСКУ МЕТОДОМ ОПТИЧНОЇ ЕМІСІЙНОЇ
СПЕКТРОСКОПІЇ
І.О. Афанасьєва, С.М. Афанасьєв, В.В. Бобков, В.В. Грицина, І.С. Махотка, І.І. Оксенюк, Д.І. Шевченко,
А.О. Скрипник
Методом оптичної емісійної спектроскопії проаналізовано аксіальний розподіл збуджених атомів аргону
і вольфраму в плазмі постійного магнетронного розряду в схрещених E×H-полях. Виявлено вплив
параметрів розряду (струм розряду Id, тиск буферного газу pAr і область світіння розряду Δl) та енергії
збуджених станів E* досліджуваних частинок на розподіл атомів Ar і W уздовж осі розряду. Зроблено
припущення про процеси збудження в магнетронній плазмі.
|
| id | nasplib_isofts_kiev_ua-123456789-194652 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1562-6016 |
| language | English |
| last_indexed | 2025-12-07T16:34:27Z |
| publishDate | 2020 |
| publisher | Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| record_format | dspace |
| spelling | Afanasіeva, I.A. Afanasiev, S.N. Bobkov, V.V. Gritsyna, V.V. Mahotka, I.S. Okseniuk, I.I. Shevchenko, D.I. Skrypnyk, A.O. 2023-11-28T10:55:23Z 2023-11-28T10:55:23Z 2020 Study of low-pressure discharge by optical emission spectroscopy / I.A. Afanasіeva, S.N. Afanasiev, V.V. Bobkov, V.V. Gritsyna, I.S. Mahotka, I.I. Okseniuk, D.I. Shevchenko, A.O. Skrypnyk // Problems of atomic science and tecnology. — 2020. — № 6. — С. 98-102. — Бібліогр.: 20 назв. — англ. 1562-6016 PACS: 32.30.−r, 34.35.+a, 34.50.−s, 34.50.Dy, 34.80.Dp, 52.70.Kz, 52.80.Vp https://nasplib.isofts.kiev.ua/handle/123456789/194652 The axial distribution of excited argon and tungsten atoms in plasma of direct current magnetron discharge in crossed fields have been analyzed by optical emission spectroscopy. The influence of discharge parameters (discharge current I, buffer gas pressure pAr and zone of discharge glow Δl) and excited states energy E* of studied particles on the axial distribution Ar and W atoms have been observed. The assumption about the excitation processes in the magnetron plasma is given. Методом оптичної емісійної спектроскопії проаналізовано аксіальний розподіл збуджених атомів аргону і вольфраму в плазмі постійного магнетронного розряду в схрещених E×H-полях. Виявлено вплив параметрів розряду (струм розряду Id, тиск буферного газу pAr і область світіння розряду Δl) та енергії збуджених станів E* досліджуваних частинок на розподіл атомів Ar і W уздовж осі розряду. Зроблено припущення про процеси збудження в магнетронній плазмі. Методом оптической эмиссионной спектроскопии проанализировано аксиальное распределение возбуж- денных атомов аргона и вольфрама в плазме постоянного магнетронного разряда в скрещенных E×H-полях. Обнаружено влияние параметров разряда (ток разряда Id, давление буферного газа pAr и область свечения разряда Δl) и энергии возбужденных состояний E* исследуемых частиц на распределение атомов Ar и W вдоль оси разряда. Сделано предположение о процессах возбуждения в магнетронной плазме. en Національний науковий центр «Харківський фізико-технічний інститут» НАН України Вопросы атомной науки и техники Plasma dynamics and plasma-wall interaction Study of low-pressure discharge by optical emission spectroscopy Дослідження розряду низького тиску методом оптичної емісійної спектроскопії Исследование разряда низкого давления методом оптической эмиссионной спектроскопии Article published earlier |
| spellingShingle | Study of low-pressure discharge by optical emission spectroscopy Afanasіeva, I.A. Afanasiev, S.N. Bobkov, V.V. Gritsyna, V.V. Mahotka, I.S. Okseniuk, I.I. Shevchenko, D.I. Skrypnyk, A.O. Plasma dynamics and plasma-wall interaction |
| title | Study of low-pressure discharge by optical emission spectroscopy |
| title_alt | Дослідження розряду низького тиску методом оптичної емісійної спектроскопії Исследование разряда низкого давления методом оптической эмиссионной спектроскопии |
| title_full | Study of low-pressure discharge by optical emission spectroscopy |
| title_fullStr | Study of low-pressure discharge by optical emission spectroscopy |
| title_full_unstemmed | Study of low-pressure discharge by optical emission spectroscopy |
| title_short | Study of low-pressure discharge by optical emission spectroscopy |
| title_sort | study of low-pressure discharge by optical emission spectroscopy |
| topic | Plasma dynamics and plasma-wall interaction |
| topic_facet | Plasma dynamics and plasma-wall interaction |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/194652 |
| work_keys_str_mv | AT afanasíevaia studyoflowpressuredischargebyopticalemissionspectroscopy AT afanasievsn studyoflowpressuredischargebyopticalemissionspectroscopy AT bobkovvv studyoflowpressuredischargebyopticalemissionspectroscopy AT gritsynavv studyoflowpressuredischargebyopticalemissionspectroscopy AT mahotkais studyoflowpressuredischargebyopticalemissionspectroscopy AT okseniukii studyoflowpressuredischargebyopticalemissionspectroscopy AT shevchenkodi studyoflowpressuredischargebyopticalemissionspectroscopy AT skrypnykao studyoflowpressuredischargebyopticalemissionspectroscopy AT afanasíevaia doslídžennârozrâdunizʹkogotiskumetodomoptičnoíemísíinoíspektroskopíí AT afanasievsn doslídžennârozrâdunizʹkogotiskumetodomoptičnoíemísíinoíspektroskopíí AT bobkovvv doslídžennârozrâdunizʹkogotiskumetodomoptičnoíemísíinoíspektroskopíí AT gritsynavv doslídžennârozrâdunizʹkogotiskumetodomoptičnoíemísíinoíspektroskopíí AT mahotkais doslídžennârozrâdunizʹkogotiskumetodomoptičnoíemísíinoíspektroskopíí AT okseniukii doslídžennârozrâdunizʹkogotiskumetodomoptičnoíemísíinoíspektroskopíí AT shevchenkodi doslídžennârozrâdunizʹkogotiskumetodomoptičnoíemísíinoíspektroskopíí AT skrypnykao doslídžennârozrâdunizʹkogotiskumetodomoptičnoíemísíinoíspektroskopíí AT afanasíevaia issledovanierazrâdanizkogodavleniâmetodomoptičeskoiémissionnoispektroskopii AT afanasievsn issledovanierazrâdanizkogodavleniâmetodomoptičeskoiémissionnoispektroskopii AT bobkovvv issledovanierazrâdanizkogodavleniâmetodomoptičeskoiémissionnoispektroskopii AT gritsynavv issledovanierazrâdanizkogodavleniâmetodomoptičeskoiémissionnoispektroskopii AT mahotkais issledovanierazrâdanizkogodavleniâmetodomoptičeskoiémissionnoispektroskopii AT okseniukii issledovanierazrâdanizkogodavleniâmetodomoptičeskoiémissionnoispektroskopii AT shevchenkodi issledovanierazrâdanizkogodavleniâmetodomoptičeskoiémissionnoispektroskopii AT skrypnykao issledovanierazrâdanizkogodavleniâmetodomoptičeskoiémissionnoispektroskopii |