Study of low-pressure discharge by optical emission spectroscopy

• Published in: Вопросы атомной науки и техники
• Date: 2020
• Main Authors: Afanasіeva, I.A., Afanasiev, S.N., Bobkov, V.V., Gritsyna, V.V., Mahotka, I.S., Okseniuk, I.I., Shevchenko, D.I., Skrypnyk, A.O.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2020
• Subjects: Plasma dynamics and plasma-wall interaction
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/194652
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Study of low-pressure discharge by optical emission spectroscopy / I.A. Afanasіeva, S.N. Afanasiev, V.V. Bobkov, V.V. Gritsyna, I.S. Mahotka, I.I. Okseniuk, D.I. Shevchenko, A.O. Skrypnyk // Problems of atomic science and tecnology. — 2020. — № 6. — С. 98-102. — Бібліогр.: 20 назв. — англ.

The axial distribution of excited argon and tungsten atoms in plasma of direct current magnetron discharge in crossed fields have been analyzed by optical emission spectroscopy. The influence of discharge parameters (discharge current I, buffer gas pressure pAr and zone of discharge glow Δl) and exc...