Zykov, A., Yefymenko, N., Dudin, S., & Yakovin, S. (2020). Discharge characteristics of combined low energy ion source – magnetron sputtering system. Вопросы атомной науки и техники.
Chicago Style (17th ed.) CitationZykov, A., N. Yefymenko, S. Dudin, and S. Yakovin. "Discharge Characteristics of Combined Low Energy Ion Source – Magnetron Sputtering System." Вопросы атомной науки и техники 2020.
MLA (8th ed.) CitationZykov, A., et al. "Discharge Characteristics of Combined Low Energy Ion Source – Magnetron Sputtering System." Вопросы атомной науки и техники, 2020.
Warning: These citations may not always be 100% accurate.