Discharge characteristics of combined low energy ion source – magnetron sputtering system

• Published in: Вопросы атомной науки и техники
• Date: 2020
• Main Authors: Zykov, A., Yefymenko, N., Dudin, S., Yakovin, S.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2020
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/194668
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Discharge characteristics of combined low energy ion source – magnetron sputtering system / A. Zykov, N. Yefymenko, S. Dudin, S. Yakovin // Problems of atomic science and tecnology. — 2020. — № 6. — С. 169-173. — Бібліогр.: 10 назв. — англ.

The discharge characteristics of a new combined low energy magnetron-ion-source sputtering system are presented. The ignition curves, current-voltage characteristics of the system in dependence on gas pressure, magnitude and topology of magnetic field have been researched both for autonomous operati...