Characteristics of TiN coating deposited by vacuum-arc method on rotating cylindrical sample

• Published in: Вопросы атомной науки и техники
• Date: 2019
• Main Authors: Kalinichenko, A.I., Strel’nitskij, V.E.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2019
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/194704
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Characteristics of TiN coating deposited by vacuum-arc method on rotating cylindrical sample / A.I. Kalinichenko, V.E. Strel’nitskij // Problems of atomic science and technology. — 2019. — № 1. — С. 142-144. — Бібліогр.: 6 назв. — англ.

The dependences of the growth rate and intrinsic stress on the accelerating potential for coating TiN deposited from the Ti⁺ ion flow on the surface of cylindrical article are investigated theoretically. The sample rotates around the symmetry axis perpendicular to the flow of incident ions. The stud...