Investigation of the influence of Ar pressure on vacuum-arc plasma with Cr-, Cu-, and Zr-cathodes

The work deals with the influence of argon pressure on the ion current of vacuum-arc discharge in the “Bulat-6” setup with Cr-Cu-Zr-cathodes, and also, on the rate of coating deposition on the surfaces being perpendicular and parallel to the plasma stream. It is shown that a substantial decrease in...

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Published in:Вопросы атомной науки и техники
Date:2019
Main Authors: Kovtun, Yu.V., Kuprin, A.S., Lunev, V.M.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2019
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Online Access:https://nasplib.isofts.kiev.ua/handle/123456789/194705
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Journal Title:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:Investigation of the influence of Ar pressure on vacuum-arc plasma with Cr-, Cu-, and Zr-cathodes / Yu.V. Kovtun, A.S. Kuprin, V.M. Lunev // Problems of atomic science and technology. — 2019. — № 1. — С. 145-148. — Бібліогр.: 25 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine