Dc glow discharge for synthesis diamond films with high growth rate
The results of experiments on further investigation of the growth kinetics of diamond films in a dc glow discharge on modernized equipment are presented. As a result of the research, it was possible to expand the possibilities of using equipment for the synthesis of diamond films in a glow discharge...
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| Published in: | Вопросы атомной науки и техники |
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| Date: | 2019 |
| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2019
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/194713 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Dc glow discharge for synthesis diamond films with high growth rate / V.I. Gritsyna, O.A. Opalev, V.E. Strel’nitskij // Problems of atomic science and technology. — 2019. — № 1. — С. 176-179. — Бібліогр.: 10 назв. — англ. |