Estimation of local inhomogeneity of multilayer nanostructured ZrN/ZrO₂ coating

• Published in: Вопросы атомной науки и техники
• Date: 2021
• Main Authors: Skoblo, T.S., Romaniuk, S.P., Belkin, Ye.L., Maltsev, T.V.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2021
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/194766
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Estimation of local inhomogeneity of multilayer nanostructured ZrN/ZrO₂ coating / T.S. Skoblo, S.P. Romaniuk, Ye.L. Belkin, T.V. Maltsev // Problems of atomic science and tecnology. — 2021. — № 1. — С. 106-109. — Бібліогр.: 7 назв. — англ.

Multilayer nanostructured ZrN/ZrO₂ coatings were applied to increase the operational resistance of various machinery parts by using vacuum-arc deposition in Bulat-type facility. To describe the structure formation, a new approach based on optical-mathematical method for processing metallographic ima...