Dudin, S., Yakovin, S., Zykov, A., & Yefymenko, N. (2021). Optical and mass spectra from reactive plasma at magnetron deposition of tantalum oxynitride. Вопросы атомной науки и техники.
Chicago Style (17th ed.) CitationDudin, S., S. Yakovin, A. Zykov, and N. Yefymenko. "Optical and Mass Spectra from Reactive Plasma at Magnetron Deposition of Tantalum Oxynitride." Вопросы атомной науки и техники 2021.
MLA (8th ed.) CitationDudin, S., et al. "Optical and Mass Spectra from Reactive Plasma at Magnetron Deposition of Tantalum Oxynitride." Вопросы атомной науки и техники, 2021.
Warning: These citations may not always be 100% accurate.