Optical and mass spectra from reactive plasma at magnetron deposition of tantalum oxynitride

• Published in: Вопросы атомной науки и техники
• Date: 2021
• Main Authors: Dudin, S., Yakovin, S., Zykov, A., Yefymenko, N.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2021
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/194770
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Optical and mass spectra from reactive plasma at magnetron deposition of tantalum oxynitride / S. Dudin, S. Yakovin, A. Zykov, N. Yefymenko // Problems of atomic science and tecnology. — 2021. — № 1. — С. 122-126. — Бібліогр.: 7 назв. — англ.

Processes in reactive plasma during the magnetron deposition of tantalum oxynitride with ICP activation of reactive gas are studied in dependence on Oxygen fraction. Results of spectroscopic study of optical emission from the plasma and of mass-spectrometry of gas composition in the vacuum chamber i...