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Optimization of the magnetic system of a vacuum-arc plasma source with a straight line filter

The vacuum-arc plasma source with a rectilinear filter has been optimized for deposition of coatings on large size products. The calculations of the magnetic configuration options of the system were performed by using the FEMM program. New design of the output coil of the filter allows increase by 1...

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Bibliographische Detailangaben
Veröffentlicht in:Вопросы атомной науки и техники
Datum:2021
Hauptverfasser: Aksyonov, D.S., Vasyliev, V.V., Luchaninov, A.A., Strelnitskij, V.E.
Format: Artikel
Sprache:Englisch
Veröffentlicht: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2021
Schlagworte:
Low temperature plasma and plasma technologies
Online Zugang:https://nasplib.isofts.kiev.ua/handle/123456789/194774
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Zitieren:Optimization of the magnetic system of a vacuum-arc plasma source with a straight line filter / D.S. Aksyonov, V.V. Vasyliev, A.A. Luchaninov, V.E. Strelnitskij // Problems of atomic science and tecnology. — 2021. — № 1. — С. 145-149. — Бібліогр.: 14 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine

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