Optimization of the magnetic system of a vacuum-arc plasma source with a straight line filter
The vacuum-arc plasma source with a rectilinear filter has been optimized for deposition of coatings on large size products. The calculations of the magnetic configuration options of the system were performed by using the FEMM program. New design of the output coil of the filter allows increase by 1...
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| Published in: | Вопросы атомной науки и техники |
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| Date: | 2021 |
| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2021
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/194774 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Optimization of the magnetic system of a vacuum-arc plasma source with a straight line filter / D.S. Aksyonov, V.V. Vasyliev, A.A. Luchaninov, V.E. Strelnitskij // Problems of atomic science and tecnology. — 2021. — № 1. — С. 145-149. — Бібліогр.: 14 назв. — англ. |