Application of pulse power supply for diamond coatings deposition in glow discharge plasma

• Veröffentlicht in: Вопросы атомной науки и техники
• Datum: 2019
• Hauptverfasser: Koshevoy, K.I., Volkov, Yu.Ya., Strel’nitskij, V.E., Reshetnyak, E.N.
• Format: Artikel
• Sprache: English
• Veröffentlicht: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2019
• Schlagworte: Low temperature plasma and plasma technologies
• Online Zugang: https://nasplib.isofts.kiev.ua/handle/123456789/194829
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Zitieren: Application of pulse power supply for diamond coatings deposition in glow discharge plasma / K.I. Koshevoy, Yu.Ya. Volkov, V.E. Strel’nitskij, E.N. Reshetnyak // Problems of atomic science and technology. — 2019. — № 1. — С. 197-200. — Бібліогр.: 10 назв. — англ.

Comparative studies of diamond coatings deposition have been carried out in the glow discharge plasma stabilized by a magnetic field in methane-hydrogen medium with using the DC or pulse power supply. It was shown that using of a pulsed power supply leads to an increase of the input power range at w...