Investigation of the abrasive durability of the multilayer diamond-like coatings for the ring-shaped dry gaseous seals made of SiC

• Published in: Вопросы атомной науки и техники
• Date: 2019
• Main Authors: Vasyliev, V.V., Luchaninov, A.A., Strel’nitskij, V.E.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2019
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/194834
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Investigation of the abrasive durability of the multilayer diamond-like coatings for the ring-shaped dry gaseous seals made of SiC / V.V. Vasyliev, A.A. Luchaninov, V.E. Strel’nitskij // Problems of atomic science and technology. — 2019. — № 1. — С. 216-218. — Бібліогр.: 5 назв. — англ.

The abrasion resistance of multi-layer vacuum-arc diamond-like (DLC) coatings of various architectures: quasigradient, as well as coatings with alternating hard and soft layers, whose structure and mechanical characteristics are specified by the amplitude of the bias potential and the deposition tim...