Synthesis and characterisation of nanocrystalline ZrN PVD coatings on AISI 430 stainless steel
The nanocrystalline films of zirconium nitride have been synthesized using ion-plasma vacuum-arc deposition technique in combination with high-frequency discharge (RF) on AISI 430 stainless steel at 150 °C. Structure examinations X-ray fluorescent analysis (XRF), X-ray diffraction analysis (XRD), sc...
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| Zitieren: | Synthesis and characterisation of nanocrystalline ZrN PVD coatings on AISI 430 stainless steel / A.V. Taran, I.E. Garkusha, V.S. Taran, R.M. Muratov, T.S. Skoblo, S.P. Romaniuk, V.V. Starikov, A.A. Baturin // Problems of atomic science and technology. — 2019. — № 1. — С. 243-247. — Бібліогр.: 18 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1860000172882264064 |
|---|---|
| author | Taran, A.V. Garkusha, I.E. Taran, V.S. Muratov, R.M. Skoblo, T.S. Romaniuk, S.P. Starikov, V.V. Baturin, A.A. |
| author_facet | Taran, A.V. Garkusha, I.E. Taran, V.S. Muratov, R.M. Skoblo, T.S. Romaniuk, S.P. Starikov, V.V. Baturin, A.A. |
| citation_txt | Synthesis and characterisation of nanocrystalline ZrN PVD coatings on AISI 430 stainless steel / A.V. Taran, I.E. Garkusha, V.S. Taran, R.M. Muratov, T.S. Skoblo, S.P. Romaniuk, V.V. Starikov, A.A. Baturin // Problems of atomic science and technology. — 2019. — № 1. — С. 243-247. — Бібліогр.: 18 назв. — англ. |
| collection | DSpace DC |
| container_title | Вопросы атомной науки и техники |
| description | The nanocrystalline films of zirconium nitride have been synthesized using ion-plasma vacuum-arc deposition technique in combination with high-frequency discharge (RF) on AISI 430 stainless steel at 150 °C. Structure examinations X-ray fluorescent analysis (XRF), X-ray diffraction analysis (XRD), scanning electron microscopy (SEM) with microanalysis (EDS), and transmission electron microscopy (TEM), nanoidentation method – were performed to study phase and chemical composition, surface morphology, microstructure and nanohardness of coatings. The developed technology provided low-temperature coatings synthesis, minimized discharge breakdown decreasing formation of macroparticles (MPs) and allowed to deposit ZrN coatings with hardness variation 26.6…31.5 GPa. It was revealed that ZrN single-phase coatings of cubic modification with finecrystalline grains of 20 nm in size were formed.
Нанокристалічні плівки нітриду цирконію були синтезовані вакуумно-дуговим методом із застосуванням високочастотного розряду (ВЧ) на поверхні нержавіючої сталі марки AISI 430 при 150 °C. Для вивчення фазового і хімічного складів, морфології поверхні, мікроструктури і нанотвердості покриттів застосовувалися рентгенофлуоресцентний (XRF) та рентгеноструктурний (XRD) аналізи, скануюча електронна мікроскопія (SEM) з мікроаналізом (EDS) та просвічувальна електронна мікроскопія (TEM). Розроблена технологія забезпечує низькотемпературний синтез покриттів, зменшуючи утворення макрочасток, а також дозволяє осаджувати покриття ZrN з твердістю 26,6…31,5 ГПа. Встановлено утворення однофазних полікристалічних плівок ZrN кубічної модифікації з розміром зерен 20 нм.
Нанокристаллические пленки нитрида циркония были синтезированы вакуумно-дуговым методом с применением высокочастотного разряда (ВЧ) на поверхности нержавеющей стали марки AISI 430 при 150 °C. Для изучения фазового и химического составов, морфологии поверхности, микроструктуры и нанотвердости покрытий применялись рентгенофлуоресцентный (XRF) и рентгеноструктурный (XRD) анализы, сканирующая электронная микроскопия (SEM) с микроанализом (EDS) и просвечивающая электронная микроскопия (TEM). Разработанная технология обеспечивает низкотемпературный синтез покрытий, уменьшая образование макрочастиц, а также позволяет осаждать покрытия ZrN с твердостью 26,6…31,5 ГПа. Установлено образование однофазных поликристаллических пленок ZrN кубической модификации с размером зерен 20 нм.
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| first_indexed | 2025-12-07T16:35:51Z |
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| fulltext |
ISSN 1562-6016. ВАНТ. 2019. №1(119)
PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY. 2019, № 1. Series: Plasma Physics (25), p. 243-247. 243
SYNTHESIS AND CHARACTERISATION OF NANOCRYSTALLINE ZrN
PVD COATINGS ON AISI 430 STAINLESS STEEL
A.V. Taran
1
, I.E. Garkusha
1,4
, V.S. Taran
1
, R.M. Muratov
1
, T.S.
Skoblo
2
, S.P. Romaniuk
2
,
V.V. Starikov
3
, A.A. Baturin
3
1
National Science Center “Kharkov Institute of Physics and Technology”,
Institute of Plasma Physics, Kharkiv, Ukraine;
2
Kharkov National Technical University of Agriculture, Kharkiv, Ukraine;
3
National Technical University “Kharkov Polytechnic Institute”, Kharkiv, Ukraine;
4
V.N. Karazin Kharkiv National University, Kharkiv, Ukraine
Email: avtaran@ukr.net
The nanocrystalline films of zirconium nitride have been synthesized using ion-plasma vacuum-arc deposition
technique in combination with high-frequency discharge (RF) on AISI 430 stainless steel at 150
o
C. Structure examinations
X-ray fluorescent analysis (XRF), X-ray diffraction analysis (XRD), scanning electron microscopy (SEM) with
microanalysis (EDS), and transmission electron microscopy (TEM), nanoidentation method – were performed to study
phase and chemical composition, surface morphology, microstructure and nanohardness of coatings. The developed
technology provided low-temperature coatings synthesis, minimized discharge breakdown decreasing formation of
macroparticles (MPs) and allowed to deposit ZrN coatings with hardness variation 26.6…31.5 GPa. It was revealed that
ZrN single-phase coatings of cubic modification with finecrystalline grains of 20 nm in size were formed.
PACS: 52.77.-j; 81.20.-n
INTRODUCTION
Zirconium nitride (ZrN) ceramic with cubic structure
has high wear, fatigue and corrosion resistance
properties and is widely used as hard, refractory and
bioinert coating in industry and medicine [1-4]. Crystal
structure and mechanical properties of ZrN are similar
to TiN, but ZrN lattice parameter exceeds TiN one (ZrN,
a = 4.58 Å and TiN, a = 4.24 Å). According to Zr-N phase
diagram there are stoichiometric ZrN and non-
stoichiometric metastable Zr2N, ZrN2, Zr3N4, and Zr4N3
phases [5]. Hardness and elastic modulus of the ZrN
coating is around 25 and 420 GPa respectively [6-11].
Wear test results indicated that ZrN is similar to titanium
nitride in conventional metal cutting applications, but
outperforms TiN by a factor of two when cutting titanium
and aluminum alloys [12].
ZrN thin films have been synthesized by various
CVD and PVD deposition methods [13, 14]. It is well
known that PVD technology modifies the surface
properties of tools without changing the undercoating
material properties and biomechanical functionality.
Plasma based PVD coatings have favorable residual
stresses, higher density and better adhesion compared to
other techniques. macroparticles. The utilization of
vacuum-arc evaporation with RF discharge allows
applying coatings onto dielectrics and termoliable
instrument at low temperature decreasing the amount of
macroparticles emitted from plasma flow.
In the present paper ZrN coatings were obtained on
AISI 430 stainless steel substrates using vacuum-arc
deposition technique with high-frequency discharge
regime (RF) at 150
o
C. Special attention was paid to
functional properties of the obtained coatings dependent
on the microstructure (grain size, phase composition,
nanohardness) to settle the correlation between
structure-phase conditions and mechanical properties of
the coatings.
1. EXPERIMENTAL SETUP
ZrN coatings were synthesized using vacuum-arc
method with RF discharge in Bulat-6 type device [15-
18]. Bias potential was applied to the substrate from RF
generator, which produced impulses of oscillations at 5
MHz frequency. Chemically pure zirconium (99.999)
was used as a cathode material. Nitrogen 99.999%
purity was used as an active gas. Polished stainless steel
samples (AISI 430) of 25 × 25 × 3 mm size were used
as the substrate material (roughness Ra ≈ 0.09 µm).
Chemical composition of AISI 430 according to XRF
data is presented in Table 1.
Table 1
Chemical composition of AISI 430 SS
C Mn P S Si Cr Fe
0.12 1.0 0.035 0.03 1.0 17.0 81
Before deposition, the substrates were cleaned in an
ultrasonic bath for 10 min. The surface cleaning in RF
discharge was carried out in argon plasma for substrate
degreasing and removing impurities during 15 min
(Ubias = 1000 V, P(Ar) = 6 × 10
-1
Pa). The Zr buffer
layer of 20 nm thickness was deposited before the
nitride coatings to improve coating adhesion. It was
used Iarc = 110 А, U
RF
bias = - 200 V, base pressure
P = 5 × 10
-4
Pa and deposition time 25 min.
The surface topography was studied using JEOL
JSM-6390LV scanning electron microscope (SEM) with
an accelerating voltage of 20 kV, chemical composition
was examined using EDS analysis.
The microstructure and phase composition were
investigated by methods of transmission electron
microscopy (TEM) using EMV-100L electron
microscope at accelerating voltage of 100 kV. The ZrN
coatings of 70 nm thickness were synthesized on (001)
244 ISSN 1562-6016. ВАНТ. 2019. №1(119)
KCl chipped crystals for transmission electron
microscopy using the same deposition parameters.
Energy-dispersive spectrometer SPRUT-K (AO
Ukrrentgen, Ukraine) was used for X-ray fluorescent
analysis and was equipped with Si (Li) Х-100 detector
(Amptek, USA) in the arrangement with a Si and KCl
secondary target. An X-ray tube BS-22 with shooting-
through type Ag anode was applied. The tube regime:
U = 35 kV, I = 250 A, and exposure time 300 s. Film
thickness was determined by XRF examinations and
average film thickness was 1.67 µm.
X-ray diffraction (XRD) analysis were performed
using DRON-3M device, under Cu-Kα radiation,
monohromated by (002) HOPG in diffracted beam. The
XRD line scans were performed in θ-2θ scanning mode
where the incident angle θ and diffracted angle 2θ are
scanned simultaneously.
The nanohardness was measured by Nanoindenter
G200 (USA). The loading and unloading rates of the
nanoindentation were 10 mN/min. Samples were tested
to a depth of 500 nm. The distance between prints were
15 μm and for each sample was made 7 prints.
2. RESULTS AND DISCUSSION
2.1. STRUCTURE, CHEMICAL AND PHASE
COMPOSITION
A typical XRD pattern of ZrN coating obtained in
RF regime is presented in Fig.1.
Fig. 1. XRD spectra of ZrN coating
All angels of diffraction peaks with (111), (222), and
(220) main reflections were indexed as ZrN phase with
a crystal structure of B1 NaCl cubic lattice type
(according to JCPDS 35…0753, a = 0.4577 nm lattice
constant).The high intensity of the ZrN (111) Bragg
peak, indicates that the ZrN grains grow with the [111]
preferred orientation perpendicular to the growth plane.
According to literature data, for transition nitrides with
NaCl-type lattice, which belong to octahedral structures,
periodic alternation of atomic layers fully occupied with
only metal and non-metal (nitrogen) atoms took place
along [111] direction. Such arrangement of the layers
corresponds to the lowest surface free energy of the
system and is the most frequently encountered case,
especially with low stresses developing in the
condensate and at the initial stages of film growth.
The [111] texture was also monitored for various
types of films (TiN, CrN, TiAlN, TiCN) deposited by
cathodic arc technique. The presence of highly ionized
plasma also favors the film growth in the most densely
packed direction.
The width of XRD peaks indicated finecrystalline
structure with the average grain size of 15…20 nm. It
was reported that the high-frequency technique leads to
smaller average crystallite size in comparison with the
standard PVD mode due to higher density of nuclei’s of
crystal during its formation. The microdeformation of
crystallites was also smaller at using of the RF method.
The XRD data has good correlation with TEM
investigations. The electron-microscopic image and
electron-diffraction pattern of ZrN film grown on (001)
KCl are shown in Fig. 2,a,b.
All electron-diffraction lines were indexed as ZrN
phase with bcc lattice having stoichiometric
composition. No additional phases have been revealed.
The obtained results are summarized in Table 2. The
average grain size was 0.02 µm.
a
b
Fig. 2. TEM image (a), electron diffraction pattern (b)
of ZrN
Table 2
Interplanar distances of ZrN coating on (001) KCl
The light optical microscopy images of the initial
surface and deposited ZrN coating are presented in
Fig. 3.
ZrN PDF
(35-0573) d, Å
Cubic
ZrN
d, Å
I,
%
h,k,l
2.64
2.29
1.61
1.38
1.32
1.14
2.63
2.27
1.59
1.36
1.32
1.15
100
74
36
24
9
2
(111)
(200)
(220)
(311)
(222)
(400)
ZrN cubic 111 200 220
0.1 µm
20 30 40 50 60 70 80 90 100
0
200
400
600
800
1000
1200
1400
1600
1800
2000
2200
Z
rN
(2
2
2
)
F
e
(2
1
1
)
F
e
(2
0
0
)
F
e
(1
1
0
)
Z
rN
(2
2
0
)
2deg.
In
te
n
si
ty
,
p
u
ls
/s
ZrN(ВЧ)
Z
rN
(1
1
1
)
ISSN 1562-6016. ВАНТ. 2019. №1(119) 245
The surface morphology and chemical composition
heterogeneity of ZrN coatings was also examined using
scanning electron microscope JEOL JSM-6390LV,
equipped with EDS. (Figs. 4, 5). The surface is rather
smooth having a small number of macrodefects
identified as drops from the cathode material. (Fig. 6,a-
c). The size of macroparticles does not exceed 4 µm. In
accordance with energy-dispersive X-ray analysis the
integral chemical composition was: Zr – 34.50 at.%,
N – 38.86 at.%, O – 12.93 at.%, C – 13.22 at.%. (see
Fig. 5,d).
a
b
Fig. 3. Light optical microscopy images of the initial
surface at × 160 (a), and ZrN coating at × 300
magnifications (b)
a
b
Fig. 4. Surface morphology (a) and (b) EDS spectra of
ZrN coating
The presence of small quantity of oxygen and carbon
is due to residual gas incorporated in the chamber walls
and contamination during sample handling in open
atmosphere before the composition analysis. Using
thermionic emission, it was monitored homogeneous
distribution of selected chemical components on the
surface (see Fig. 5,d). EDS microanalysis taken from
four local areas is presented in Table 3.
Table 3
Chemical composition from local selected areas
(see Fig. 5,d) (EDS)
Element Conc. Intensity wt.% at.%
C 0.42 0.7480 3.89 13.22
N 0.29 0.1461 13.33 38.86
O 0.36 0.4829 5.07 12.93
Fe 0.09 0.9833 0.66 0.48
Zr 10.54 0.9330 77.06 34.50
a
b
c
d
Fig. 5. SEM images (a-c) and homogeneous distribution
of selected elements on the surface (d)
246 ISSN 1562-6016. ВАНТ. 2019. №1(119)
2.2. MECHANICAL PROPERTIES
The microhardness of the coating strongly depends
on structural parameters such as crystallographic
orientation, microstress, and crystallite size. One of the
main characteristics of the material is the ratio of its
hardness to the elastic modulus H/E, called plasticity
index. The ratio H
3
/E*
2
(where E* = E/(l - μ
2
) – the
effective elastic modulus; μ – Poisson's ratio) is also
qualitative comparative characteristic of the plastic
deformation resistance. To increase the plastic
deformation resistance it is required to strive for the
lowest possible elastic modulus at high hardness which,
in particular, takes place at grain sizes of less than
10 nm. In general, the low module is good, because it
allows distributing load within a wide area.
Table 4
Mechanical properties of AISI 430 and ZrN
№
AISI 430 ZrN coating
E, GPa H, GPa H/E E, GPa H, GPa H/E
1 204.496 3.727 0.018 336.309 31.071 0.092
2 184.049 4.084 0.021 333.475 31.576 0.094
3 203.588 3.872 0.019 288.604 26.11 0.090
4 205.773 3.99 0.019 302.027 26.635 0.088
5 198.272 3.61 0.018 316.364 29.188 0.092
6 202.134 4.559 0.022 331.657 29.14 0.087
7 209.751 3.8 0.018 337.236 32.047 0.095
201.151 4.092 0.02 320.81 29.395 0.091
The effective elastic modulus E*, the shear modulus
G, yield stress point σT and coefficient of resistance to
plastic deformation H
3
/E*
2
were determined using
model equations. The shear modulus (G) and yield
stress (σT) are defined as G = E/2 × (1+μ); σT = Hµ/3.
The nanoidentation diagrams for ZrN coating are
presented in Fig. 6. The results of H and E values for 7
prints are summarized in Table 4. The G, σT, H
3
/E*
2
parameters were measured only for average H and E
values and are presented in Table 5.
Table 5
G, σT , H
3
/E*
2
parameters of AISI 430 and ZrN coating
based on H and E average values
Sample H, GPa E, GPa G, GPa
σT,
MPa
H3/E*2
AISI 430 4 204 62 133 0.0014
AISI 430/ZrN 29 320 121 966 0.05
According to nanohardness tests, ZrN coating has
much higher elastic properties than initial stainless steel.
The average value of nanohardness for stainless steel
was 4.09 GPa, and it reached 29.39 GPa for the ZrN
coated sample. The average value of elastic modulus for
the ZrN was 320.81 GPa, whereas without the coating it
comprised 201.151 GPa with a data spread of 9.54 %.
As it is seen from Table 5 that with increase of the ratio
H/E decreases plasticity of material and increasing of its
relative hardness.
The high hardness of the coatings can be associated
with an improvement of homogeneity of ZrN coatings
on theone hand and on the other, the hardness growth
can be related to the grinding of the grain structure
(according to Hall-Petch rule) by ion bombardment
upon application high-voltage RF pulses to the substrate
during the deposition process.
Fig. 6. Nanoidentation diagrams for the ZrN coating;
load-unload diagram (a), nanohardness (b),
elastic modulus (c)
CONCLUSIONS
Zirconium nitride coatings have been synthesized
using ion-plasma vacuum-arc deposition technique in
combination with high-frequency discharge (RF) on
AISI 430 stainless steel at 150
o
C.
The proposed technology allowed minimizing the
amount of macroparticles providing low temperature
deposition.
a
b
c
ISSN 1562-6016. ВАНТ. 2019. №1(119) 247
It was revealed that nanocrystalline ZrN single-phase
coatings of cubic modification with finecrystalline
grains of 20 nm in size were formed.
The average values of nanohardness and elastic
modulus of ZrN were 29.39 and 320.81 GPa,
respectively.
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Article received 22.09.2018
СИНТЕЗ И ИССЛЕДОВАНИЕ НАНОКРИСТАЛЛИЧЕСКИХ ПОКРЫТИЙ ZrN, ПОЛУЧЕННЫХ
ВАКУУМНО-ДУГОВЫМ МЕТОДОМ НА НЕРЖАВЕЮЩЕЙ СТАЛИ AISI 430
A.В. Taран, И.E. Гаркуша, В.С. Таран, Р.M. Муратов, Т.С. Скобло, С.П. Романюк, В.В. Стариков,
A.A. Батурин
Нанокристаллические пленки нитрида циркония были синтезированы вакуумно-дуговым методом с
применением высокочастотного разряда (ВЧ) на поверхности нержавеющей стали марки AISI 430 при
150
o
C. Для изучения фазового и химического составов, морфологии поверхности, микроструктуры и
нанотвердости покрытий применялись рентгенофлуоресцентный (XRF) и рентгеноструктурный (XRD)
анализы, сканирующая электронная микроскопия (SEM) с микроанализом (EDS) и просвечивающая
электронная микроскопия (TEM). Разработанная технология обеспечивает низкотемпературный синтез
покрытий, уменьшая образование макрочастиц, а также позволяет осаждать покрытия ZrN с твердостью
26,6…31,5 ГПа. Установлено образование однофазных поликристаллических пленок ZrN кубической
модификации с размером зерен 20 нм.
СИНТЕЗ І ДОСЛІДЖЕННЯ НАНОКРИСТАЛІЧНИХ ПОКРИТТІВ ZrN, ОТРИМАНИХ
ВАКУУМНО-ДУГОВИМ МЕТОДОМ НА НЕРЖАВІЮЧІЙ СТАЛІ AISI 430
A.В. Taран, І.Є. Гаркуша, В.С. Таран, Р.M. Муратов, Т.С. Скобло, С.П. Романюк, В.В. Старіков,
О.A. Батурин
Нанокристалічні плівки нітриду цирконію були синтезовані вакуумно-дуговим методом із застосуванням
високочастотного розряду (ВЧ) на поверхні нержавіючої сталі марки AISI 430 при 150
o
C. Для вивчення
фазового і хімічного складів, морфології поверхні, мікроструктури і нанотвердості покриттів
застосовувалися рентгенофлуоресцентний (XRF) та рентгеноструктурний (XRD) аналізи, скануюча
електронна мікроскопія (SEM) з мікроаналізом (EDS) та просвічувальна електронна мікроскопія (TEM).
Розроблена технологія забезпечує низькотемпературний синтез покриттів, зменшуючи утворення
макрочасток, а також дозволяє осаджувати покриття ZrN з твердістю 26,6…31,5 ГПа. Встановлено
утворення однофазних полікристалічних плівок ZrN кубічної модифікації з розміром зерен 20 нм.
|
| id | nasplib_isofts_kiev_ua-123456789-194902 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1562-6016 |
| language | English |
| last_indexed | 2025-12-07T16:35:51Z |
| publishDate | 2019 |
| publisher | Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| record_format | dspace |
| spelling | Taran, A.V. Garkusha, I.E. Taran, V.S. Muratov, R.M. Skoblo, T.S. Romaniuk, S.P. Starikov, V.V. Baturin, A.A. 2023-12-01T13:51:38Z 2023-12-01T13:51:38Z 2019 Synthesis and characterisation of nanocrystalline ZrN PVD coatings on AISI 430 stainless steel / A.V. Taran, I.E. Garkusha, V.S. Taran, R.M. Muratov, T.S. Skoblo, S.P. Romaniuk, V.V. Starikov, A.A. Baturin // Problems of atomic science and technology. — 2019. — № 1. — С. 243-247. — Бібліогр.: 18 назв. — англ. 1562-6016 PACS: 52.77.-j; 81.20.-n https://nasplib.isofts.kiev.ua/handle/123456789/194902 The nanocrystalline films of zirconium nitride have been synthesized using ion-plasma vacuum-arc deposition technique in combination with high-frequency discharge (RF) on AISI 430 stainless steel at 150 °C. Structure examinations X-ray fluorescent analysis (XRF), X-ray diffraction analysis (XRD), scanning electron microscopy (SEM) with microanalysis (EDS), and transmission electron microscopy (TEM), nanoidentation method – were performed to study phase and chemical composition, surface morphology, microstructure and nanohardness of coatings. The developed technology provided low-temperature coatings synthesis, minimized discharge breakdown decreasing formation of macroparticles (MPs) and allowed to deposit ZrN coatings with hardness variation 26.6…31.5 GPa. It was revealed that ZrN single-phase coatings of cubic modification with finecrystalline grains of 20 nm in size were formed. Нанокристалічні плівки нітриду цирконію були синтезовані вакуумно-дуговим методом із застосуванням високочастотного розряду (ВЧ) на поверхні нержавіючої сталі марки AISI 430 при 150 °C. Для вивчення фазового і хімічного складів, морфології поверхні, мікроструктури і нанотвердості покриттів застосовувалися рентгенофлуоресцентний (XRF) та рентгеноструктурний (XRD) аналізи, скануюча електронна мікроскопія (SEM) з мікроаналізом (EDS) та просвічувальна електронна мікроскопія (TEM). Розроблена технологія забезпечує низькотемпературний синтез покриттів, зменшуючи утворення макрочасток, а також дозволяє осаджувати покриття ZrN з твердістю 26,6…31,5 ГПа. Встановлено утворення однофазних полікристалічних плівок ZrN кубічної модифікації з розміром зерен 20 нм. Нанокристаллические пленки нитрида циркония были синтезированы вакуумно-дуговым методом с применением высокочастотного разряда (ВЧ) на поверхности нержавеющей стали марки AISI 430 при 150 °C. Для изучения фазового и химического составов, морфологии поверхности, микроструктуры и нанотвердости покрытий применялись рентгенофлуоресцентный (XRF) и рентгеноструктурный (XRD) анализы, сканирующая электронная микроскопия (SEM) с микроанализом (EDS) и просвечивающая электронная микроскопия (TEM). Разработанная технология обеспечивает низкотемпературный синтез покрытий, уменьшая образование макрочастиц, а также позволяет осаждать покрытия ZrN с твердостью 26,6…31,5 ГПа. Установлено образование однофазных поликристаллических пленок ZrN кубической модификации с размером зерен 20 нм. en Національний науковий центр «Харківський фізико-технічний інститут» НАН України Вопросы атомной науки и техники Plasma diagnostics Synthesis and characterisation of nanocrystalline ZrN PVD coatings on AISI 430 stainless steel Синтез і дослідження нанокристалічних покриттів ZrN, отриманих вакуумно-дуговим методом на нержавіючій сталі AISI 430 Синтез и исследование нанокристаллических покрытий ZrN, полученных вакуумно-дуговым методом на нержавеющей стали AISI 430 Article published earlier |
| spellingShingle | Synthesis and characterisation of nanocrystalline ZrN PVD coatings on AISI 430 stainless steel Taran, A.V. Garkusha, I.E. Taran, V.S. Muratov, R.M. Skoblo, T.S. Romaniuk, S.P. Starikov, V.V. Baturin, A.A. Plasma diagnostics |
| title | Synthesis and characterisation of nanocrystalline ZrN PVD coatings on AISI 430 stainless steel |
| title_alt | Синтез і дослідження нанокристалічних покриттів ZrN, отриманих вакуумно-дуговим методом на нержавіючій сталі AISI 430 Синтез и исследование нанокристаллических покрытий ZrN, полученных вакуумно-дуговым методом на нержавеющей стали AISI 430 |
| title_full | Synthesis and characterisation of nanocrystalline ZrN PVD coatings on AISI 430 stainless steel |
| title_fullStr | Synthesis and characterisation of nanocrystalline ZrN PVD coatings on AISI 430 stainless steel |
| title_full_unstemmed | Synthesis and characterisation of nanocrystalline ZrN PVD coatings on AISI 430 stainless steel |
| title_short | Synthesis and characterisation of nanocrystalline ZrN PVD coatings on AISI 430 stainless steel |
| title_sort | synthesis and characterisation of nanocrystalline zrn pvd coatings on aisi 430 stainless steel |
| topic | Plasma diagnostics |
| topic_facet | Plasma diagnostics |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/194902 |
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