Growth rate of diamond-like coatings synthesized in RF discharge at various ratios of the concentrations of Ar and C₆H₆
Diamond-like coatings (DLC) synthesized by plasma-chemical deposition from a vapor mixture of C₆H₆ and Ar have been investigated. The growth rate of the coating was measured, which showed a nonlinear dependence on the partial pressure of Ar. The mathematical model of the deposition has been develope...
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| Published in: | Вопросы атомной науки и техники |
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| Date: | 2021 |
| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2021
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/194928 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Growth rate of diamond-like coatings synthesized in RF discharge at various ratios of the concentrations of Ar and C₆H₆ / A.I. Kalinichenko, A.О. Omarov, V.E. Strel’nitskij // Problems of Atomic Science and Technology. — 2021. — № 2. — С. 109-112. — Бібліогр.: 5 назв. — англ. |