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Growth rate of diamond-like coatings synthesized in RF discharge at various ratios of the concentrations of Ar and C₆H₆

Diamond-like coatings (DLC) synthesized by plasma-chemical deposition from a vapor mixture of C₆H₆ and Ar have been investigated. The growth rate of the coating was measured, which showed a nonlinear dependence on the partial pressure of Ar. The mathematical model of the deposition has been develope...

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Veröffentlicht in:	Вопросы атомной науки и техники
Datum:	2021
Hauptverfasser:	Kalinichenko, A.I., Omarov, A.О., Strel’nitskij, V.E.
Format:	Artikel
Sprache:	Englisch
Veröffentlicht:	Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2021
Schlagworte:	Physics of radiation and ion-plasma technologies
Online Zugang:	https://nasplib.isofts.kiev.ua/handle/123456789/194928
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!
Назва журналу:	Digital Library of Periodicals of National Academy of Sciences of Ukraine
Zitieren:	Growth rate of diamond-like coatings synthesized in RF discharge at various ratios of the concentrations of Ar and C₆H₆ / A.I. Kalinichenko, A.О. Omarov, V.E. Strel’nitskij // Problems of Atomic Science and Technology. — 2021. — № 2. — С. 109-112. — Бібліогр.: 5 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine

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