Growth rate of diamond-like coatings synthesized in RF discharge at various ratios of the concentrations of Ar and C₆H₆

• Опубліковано в: : Вопросы атомной науки и техники
• Дата: 2021
• Автори: Kalinichenko, A.I., Omarov, A.О., Strel’nitskij, V.E.
• Формат: Стаття
• Мова: English
• Опубліковано: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2021
• Теми: Physics of radiation and ion-plasma technologies
• Онлайн доступ: https://nasplib.isofts.kiev.ua/handle/123456789/194928
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Цитувати: Growth rate of diamond-like coatings synthesized in RF discharge at various ratios of the concentrations of Ar and C₆H₆ / A.I. Kalinichenko, A.О. Omarov, V.E. Strel’nitskij // Problems of Atomic Science and Technology. — 2021. — № 2. — С. 109-112. — Бібліогр.: 5 назв. — англ.

Diamond-like coatings (DLC) synthesized by plasma-chemical deposition from a vapor mixture of C₆H₆ and Ar have been investigated. The growth rate of the coating was measured, which showed a nonlinear dependence on the partial pressure of Ar. The mathematical model of the deposition has been develope...