Structural engineering of NbN/Cu multilayer coatings by changing the thickness of the layers and the magnitude of the bias potential during deposition

• Опубліковано в: : Вопросы атомной науки и техники
• Дата: 2019
• Автори: Sobol’, O.V., Andreev, A.A., Stolbovoy, V.A., Kolesnikov, D.A., Kovaleva, M.G., Meylekhov, A.A., Postelnyk, Н.О., Dolomanov, А.V., Sagaidashnikov, Yu.Ye., Kraievska, Zh.V.
• Формат: Стаття
• Мова: English
• Опубліковано: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2019
• Теми: Physics of radiotechnology and ion-plasma technologies
• Онлайн доступ: https://nasplib.isofts.kiev.ua/handle/123456789/195212
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Цитувати: Structural engineering of NbN/Cu multilayer coatings by changing the thickness of the layers and the magnitude of the bias potential during deposition / O.V. Sobol’, A.A. Andreev, V.A. Stolbovoy, D.A. Kolesnikov, M.G. Kovaleva, A.A. Meylekhov, Н.О. Postelnyk, А.V. Dolomanov, Yu.Ye. Sagaidashnikov, Zh.V. Kraievska // Problems of atomic science and technology. — 2019. — № 5. — С. 147-153. — Бібліогр.: 23 назв. — англ.

To determine the patterns of structural engineering of vacuum-arc coatings based on niobium nitride in the NbN/Cu multilayer composition, the effect of layer thickness and bias potential on the structural-phase state and physico-mechanical characteristics of vacuum-arc coatings was studied. It was f...