Kuprin, A., Leonov, S., Ovcharenko, V., Reshetnyak, E., Belous, V., Vasilenko, R., . . . Klimenko, I. (2019). Deposition of TiN-based coatings using vacuum arc plasma in increased negative substrate bias voltage. Вопросы атомной науки и техники.
Chicago-Zitierstil (17. Ausg.)Kuprin, A.S, S.A Leonov, V.D Ovcharenko, E.N Reshetnyak, V.A Belous, R.L Vasilenko, G.N Tolmachova, V.I Kovalenko, und I.O Klimenko. "Deposition of TiN-based Coatings Using Vacuum Arc Plasma in Increased Negative Substrate Bias Voltage." Вопросы атомной науки и техники 2019.
MLA-Zitierstil (8. Ausg.)Kuprin, A.S, et al. "Deposition of TiN-based Coatings Using Vacuum Arc Plasma in Increased Negative Substrate Bias Voltage." Вопросы атомной науки и техники, 2019.
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