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Vector proton beam writing system

Vector method for scanning with focused beam of megaelectronvolt-energy in proton-beam writing is described. Vector proton-beam writing method was proven experimentally to have numerous advantages over raster method. Focused beam size and shape are measured by scanning standard copper mesh for e-bea...

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Veröffentlicht in:	Вопросы атомной науки и техники
Datum:	2022
Hauptverfasser:	Polozhii, H.E., Ponomarev, A.G., Kolinko, S.V., Rebrov, V.A.
Format:	Artikel
Sprache:	Englisch
Veröffentlicht:	Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2022
Schlagworte:	Interaction of relativistic particles with crystals and matter
Online Zugang:	https://nasplib.isofts.kiev.ua/handle/123456789/195391
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!
Назва журналу:	Digital Library of Periodicals of National Academy of Sciences of Ukraine
Zitieren:	Vector proton beam writing system / H.E. Polozhii, A.G. Ponomarev, S.V. Kolinko, V.A. Rebrov // Problems of Atomic Science and Technology. — 2022. — № 3. — С. 52-55. — Бібліогр.: 8 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine

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