APA (7th ed.) Citation

Fedorovich, O., Hladkovska, O., Hladkovskyi, V., & Nedybaliuk, A. (2021). Features of plasma chemical etching of lithium tantalate substrate (LiTaO₃). Вопросы атомной науки и техники.

Chicago Style (17th ed.) Citation

Fedorovich, O.A, O.V Hladkovska, V.V Hladkovskyi, and A.F Nedybaliuk. "Features of Plasma Chemical Etching of Lithium Tantalate Substrate (LiTaO₃)." Вопросы атомной науки и техники 2021.

MLA (8th ed.) Citation

Fedorovich, O.A, et al. "Features of Plasma Chemical Etching of Lithium Tantalate Substrate (LiTaO₃)." Вопросы атомной науки и техники, 2021.

Warning: These citations may not always be 100% accurate.