Effect of nitrogen pressure on the structural and mechanical properties of V-Mo-N coatings deposited by cathodic arc evaporation

• Veröffentlicht in: Вопросы атомной науки и техники
• Datum: 2022
• Hauptverfasser: Kuprin, A.S., Reshetnyak, E.N., Gilewicz, A., Warcholinski, B., Vasilenko, R.L., Rostova, H.Yu., Klimenko, I.O., Tolmachova, G.N., Ilchenko, A.V.
• Format: Artikel
• Sprache: English
• Veröffentlicht: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2022
• Schlagworte: Physics of radiation and ion-plasma technologies
• Online Zugang: https://nasplib.isofts.kiev.ua/handle/123456789/195664
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Zitieren: Effect of nitrogen pressure on the structural and mechanical properties of V-Mo-N coatings deposited by cathodic arc evaporation / A.S. Kuprin, E.N. Reshetnyak, A. Gilewicz, B. Warcholinski, R.L. Vasilenko, H.Yu. Rostova, I.O Klimenko, G.N. Tolmachova, A.V. Ilchenko // Problems of Atomic Science and Technology. — 2022. — № 4. — С. 107-113. — Бібліогр.: 26 назв. — англ.

The coatings of the V-Mo-N system were deposited by the cathodic arc evaporation method from the unfiltered plasma of two V and Mo cathodes. Electron microscopy, energy dispersive analysis, X-ray diffractometry, nanoindentation, and adhesion testing have been used to study the effect of nitrogen pre...