Structural-phase transformations in magnetron deposited films of Ti-Zr-Ni systems during annealing in vacuum

• Veröffentlicht in: Вопросы атомной науки и техники
• Datum: 2022
• Hauptverfasser: Malykhin, S.V., Kondratenko, V.V., Kopylets, I.A., Bogdanov, Yu.S., Surovitsky, S.V., Borisova, S.S., Shipkova, I.G.
• Format: Artikel
• Sprache: Englisch
• Veröffentlicht: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2022
• Schlagworte: Pure materials and vacuum technologies
• Online Zugang: https://nasplib.isofts.kiev.ua/handle/123456789/195827
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Zitieren: Structural-phase transformations in magnetron deposited films of Ti-Zr-Ni systems during annealing in vacuum / S.V. Malykhin, V.V. Kondratenko, I.A. Kopylets, Yu.S. Bogdanov, S.V. Surovitsky, S.S. Borisova, I.G. Shipkova // Problems of Atomic Science and Technology. — 2022. — № 1. — С. 21-25. — Бібліогр.: 17 назв. — англ.

Structural and phase changes in thin films obtained by magnetron sputtering of a target with the composition Ti41Zr38.3Ni20.7 (at.%) were studied under isothermal vacuum annealing in the temperature range from 400 to 800 °C. The boundaries of the thermal stability of the phases have been determined....