Low-pressure uniform plasma generator based on hollow cathode for ion plasma technologies

• Published in: Problems of Atomic Science and Technology
• Date: 2022
• Main Authors: Khomich, V.A., Ryabtsev, A.V., Nazarenko, V.G.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2022
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/195895
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Low-pressure uniform plasma generator based on hollow cathode for ion plasma technologies / V.A. Khomich, A.V. Ryabtsev, V.G. Nazarenko // Problems of Atomic Science and Technology. — 2022. — № 6. — С. 99-102. — Бібліогр.: 11 назв. — англ.

The current paper describes the results of the improvement of a volumetric high-current low-pressure plasma generator. The device was made on the basis of a hollow cathode with a gas-magnetron ignition of the discharge and an auxiliary arc discharge for the cathode heating up to thermionic emission...