Non-destructive control of PVD coating surface defects
Nanostructured ZrN coatings were deposited by the vacuum arc method with partial separation of the plasma flow from macroparticles using a curvilinear magnetic filter. With the proposed deposition parameters, a ZrN coating with an fcc lattice and (111) texture is formed. Theoretical studies are carr...
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| Published in: | Problems of Atomic Science and Technology |
|---|---|
| Date: | 2022 |
| Main Authors: | , , , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2022
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/195907 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Non-destructive control of PVD coating surface defects / S.P. Romaniuk, M.S. Bilinska, A.V. Taran, O.Yu. Klochko, K. Nowakowska-Langier, A.K. Marchenko, E.S. Deryabkina, G.P. Nikolaychuk // Problems of Atomic Science and Technology. — 2022. — № 6. — С.139-142. — Бібліогр.: 15 назв. — англ. |