Non-destructive control of PVD coating surface defects

• Published in: Problems of Atomic Science and Technology
• Date: 2022
• Main Authors: Romaniuk, S.P., Bilinska, M.S., Taran, A.V., Klochko, O.Yu., Nowakowska-Langier, K., Marchenko, A.K., Deryabkina, E.S., Nikolaychuk, G.P.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2022
• Subjects: Low temperature plasma and plasma technologies
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/195907
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Non-destructive control of PVD coating surface defects / S.P. Romaniuk, M.S. Bilinska, A.V. Taran, O.Yu. Klochko, K. Nowakowska-Langier, A.K. Marchenko, E.S. Deryabkina, G.P. Nikolaychuk // Problems of Atomic Science and Technology. — 2022. — № 6. — С.139-142. — Бібліогр.: 15 назв. — англ.

Nanostructured ZrN coatings were deposited by the vacuum arc method with partial separation of the plasma flow from macroparticles using a curvilinear magnetic filter. With the proposed deposition parameters, a ZrN coating with an fcc lattice and (111) texture is formed. Theoretical studies are carr...